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• W3093687777 endingPage "4349" @default.
• W3093687777 startingPage "4342" @default.
• W3093687777 abstract "In this article, the design, fabrication and measurements are presented for an indirectly-heated RF MEMS thermoelectric power sensor with different terminal resistor dimensions. In this design, thermal isolation is achieved through a 20μm-thick MEMS substrate membrane using back etching technology. In order to maintain the stability of impedance matching, two low temperature coefficient of resistance (TCR) tantalum nitride (TaN ) resistors of 50 Ω are adopted to serve as heating sources. Considering the effect of the terminal resistor dimension on RF power sensing performance, six configuration sensors have been explored experimentally. Experimental results show that the output response of these devices has excellent RF-DC linearity with the power from 1 mW to 200 mW. And as the dimension of the terminal resistor gradually increases, their sensitivities are 77.3 μV/mW, 63.4 μV/mW, 56.3 μV/mW, 54.4 μV/mW, 49.5 μV/mW and 47.9 μV/mW at 10GHz, respectively. Meanwhile, the measured response time is 3.2 ms, 2.9 ms, 2.7 ms, 2.5 ms, 2.2 ms and 2.0 ms, respectively. This indicates that as the size of the terminal resistor increases, the corresponding sensitivity and response time are decreasing. Therefore, there is a trade-off consideration between high sensitivity and fast response time. Further, an electromagnetic-thermal-electric model of the indirectly-heated RF MEMS power sensor is proposed based on the Seebeck effect and heat transfer theory. Experiments and finite element method (FEM) simulation are performed to verify the validity of the proposed model. The results would be useful to improve future sensor designs and specific applications." @default.
• W3093687777 created "2020-10-29" @default.
• W3093687777 creator A5013388624 @default.
• W3093687777 creator A5039074274 @default.
• W3093687777 creator A5076798491 @default.
• W3093687777 date "2021-02-15" @default.
• W3093687777 modified "2023-10-13" @default.
• W3093687777 title "Electromagnetic-Thermal-Electric Analysis of Indirectly-Heated RF MEMS Power Sensors With Different Terminal Resistor Dimensions" @default.
• W3093687777 cites W1969759632 @default.
• W3093687777 cites W1990311671 @default.
• W3093687777 cites W1995786816 @default.
• W3093687777 cites W2011379925 @default.
• W3093687777 cites W2022384503 @default.
• W3093687777 cites W2034091283 @default.
• W3093687777 cites W2035184351 @default.
• W3093687777 cites W2048252328 @default.
• W3093687777 cites W2064273871 @default.
• W3093687777 cites W2076071918 @default.
• W3093687777 cites W2102237567 @default.
• W3093687777 cites W2102625889 @default.
• W3093687777 cites W2107580319 @default.
• W3093687777 cites W2107600071 @default.
• W3093687777 cites W2117878461 @default.
• W3093687777 cites W2135021015 @default.
• W3093687777 cites W2152410364 @default.
• W3093687777 cites W2338077256 @default.
• W3093687777 cites W2761494859 @default.
• W3093687777 cites W2980340096 @default.
• W3093687777 cites W3047299137 @default.
• W3093687777 cites W4230282064 @default.
• W3093687777 doi "https://doi.org/10.1109/jsen.2020.3033011" @default.
• W3093687777 hasPublicationYear "2021" @default.
• W3093687777 type Work @default.
• W3093687777 sameAs 3093687777 @default.
• W3093687777 citedByCount "4" @default.
• W3093687777 countsByYear W30936877772021 @default.
• W3093687777 countsByYear W30936877772022 @default.
• W3093687777 countsByYear W30936877772023 @default.
• W3093687777 crossrefType "journal-article" @default.
• W3093687777 hasAuthorship W3093687777A5013388624 @default.
• W3093687777 hasAuthorship W3093687777A5039074274 @default.
• W3093687777 hasAuthorship W3093687777A5076798491 @default.
• W3093687777 hasConcept C119599485 @default.
• W3093687777 hasConcept C121332964 @default.
• W3093687777 hasConcept C127413603 @default.
• W3093687777 hasConcept C130277099 @default.
• W3093687777 hasConcept C137488568 @default.
• W3093687777 hasConcept C137693562 @default.
• W3093687777 hasConcept C153294291 @default.
• W3093687777 hasConcept C165801399 @default.
• W3093687777 hasConcept C17829176 @default.
• W3093687777 hasConcept C191897082 @default.
• W3093687777 hasConcept C192562407 @default.
• W3093687777 hasConcept C204530211 @default.
• W3093687777 hasConcept C21200559 @default.
• W3093687777 hasConcept C24326235 @default.
• W3093687777 hasConcept C2778112282 @default.
• W3093687777 hasConcept C37977207 @default.
• W3093687777 hasConcept C49040817 @default.
• W3093687777 hasConcept C514619126 @default.
• W3093687777 hasConcept C612350 @default.
• W3093687777 hasConcept C6899612 @default.
• W3093687777 hasConcept C77170095 @default.
• W3093687777 hasConceptScore W3093687777C119599485 @default.
• W3093687777 hasConceptScore W3093687777C121332964 @default.
• W3093687777 hasConceptScore W3093687777C127413603 @default.
• W3093687777 hasConceptScore W3093687777C130277099 @default.
• W3093687777 hasConceptScore W3093687777C137488568 @default.
• W3093687777 hasConceptScore W3093687777C137693562 @default.
• W3093687777 hasConceptScore W3093687777C153294291 @default.
• W3093687777 hasConceptScore W3093687777C165801399 @default.
• W3093687777 hasConceptScore W3093687777C17829176 @default.
• W3093687777 hasConceptScore W3093687777C191897082 @default.
• W3093687777 hasConceptScore W3093687777C192562407 @default.
• W3093687777 hasConceptScore W3093687777C204530211 @default.
• W3093687777 hasConceptScore W3093687777C21200559 @default.
• W3093687777 hasConceptScore W3093687777C24326235 @default.
• W3093687777 hasConceptScore W3093687777C2778112282 @default.
• W3093687777 hasConceptScore W3093687777C37977207 @default.
• W3093687777 hasConceptScore W3093687777C49040817 @default.
• W3093687777 hasConceptScore W3093687777C514619126 @default.
• W3093687777 hasConceptScore W3093687777C612350 @default.
• W3093687777 hasConceptScore W3093687777C6899612 @default.
• W3093687777 hasConceptScore W3093687777C77170095 @default.
• W3093687777 hasFunder F4320321001 @default.
• W3093687777 hasIssue "4" @default.
• W3093687777 hasLocation W30936877771 @default.
• W3093687777 hasOpenAccess W3093687777 @default.
• W3093687777 hasPrimaryLocation W30936877771 @default.
• W3093687777 hasRelatedWork W1988031380 @default.
• W3093687777 hasRelatedWork W2055360844 @default.
• W3093687777 hasRelatedWork W2089484437 @default.
• W3093687777 hasRelatedWork W2098211241 @default.
• W3093687777 hasRelatedWork W2151350320 @default.
• W3093687777 hasRelatedWork W2151691244 @default.
• W3093687777 hasRelatedWork W2160186355 @default.
• W3093687777 hasRelatedWork W2376045024 @default.
• W3093687777 hasRelatedWork W3022842796 @default.

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