Matches in SemOpenAlex for { <https://semopenalex.org/work/W3097677712> ?p ?o ?g. }
- W3097677712 endingPage "158" @default.
- W3097677712 startingPage "145" @default.
- W3097677712 abstract "The chemical vapor deposition (CVD) of silicon carbide from vinyltrichlorosilane (VTS) was studied to identify a range of conditions leading to pure crystalline SiC. The deposition rate was recorded to evidence the various deposition regimes. Gas phase, elemental analyses and infiltration tests were also performed. Three distinct chemical reaction regimes were identified. In CVD conditions, carbon is co-deposited at low temperature while VTS is only partially decomposed. In infiltration conditions, the composition switches to pure SiC inside the porous substrate because of a depletion of reactive hydrocarbon species. Competing heterogeneous reactions are responsible for a hysteresis versus temperature, in both deposition rate and composition of the deposit. The high temperature domain is the most suitable to deposit pure crystalline SiC in CVD conditions. Hydrogen dilution strongly accelerates the homogeneous decomposition of VTS as compared to argon. Assumptions on the reaction mechanism were proposed describing the chemistry of this precursor." @default.
- W3097677712 created "2020-11-09" @default.
- W3097677712 creator A5006119791 @default.
- W3097677712 creator A5034954470 @default.
- W3097677712 creator A5086470278 @default.
- W3097677712 creator A5091061776 @default.
- W3097677712 date "2021-02-01" @default.
- W3097677712 modified "2023-09-27" @default.
- W3097677712 title "Kinetic and gas-phase study of the chemical vapor deposition of silicon carbide from C2H3SiCl3/H2" @default.
- W3097677712 cites W1613791679 @default.
- W3097677712 cites W1657752593 @default.
- W3097677712 cites W1669089194 @default.
- W3097677712 cites W1973619908 @default.
- W3097677712 cites W1974485476 @default.
- W3097677712 cites W1981172572 @default.
- W3097677712 cites W1983567503 @default.
- W3097677712 cites W1985818325 @default.
- W3097677712 cites W1989502953 @default.
- W3097677712 cites W1990830793 @default.
- W3097677712 cites W2011584818 @default.
- W3097677712 cites W2013947421 @default.
- W3097677712 cites W2019908808 @default.
- W3097677712 cites W2025627790 @default.
- W3097677712 cites W2031130307 @default.
- W3097677712 cites W2031546032 @default.
- W3097677712 cites W2036705793 @default.
- W3097677712 cites W2055906715 @default.
- W3097677712 cites W2056158012 @default.
- W3097677712 cites W2060975443 @default.
- W3097677712 cites W2065252096 @default.
- W3097677712 cites W2067762529 @default.
- W3097677712 cites W2074389408 @default.
- W3097677712 cites W2076673069 @default.
- W3097677712 cites W2083323738 @default.
- W3097677712 cites W2083367097 @default.
- W3097677712 cites W2084838589 @default.
- W3097677712 cites W2087663173 @default.
- W3097677712 cites W2090480194 @default.
- W3097677712 cites W2093325097 @default.
- W3097677712 cites W2093525810 @default.
- W3097677712 cites W2104831225 @default.
- W3097677712 cites W2129029730 @default.
- W3097677712 cites W2130700236 @default.
- W3097677712 cites W2136999834 @default.
- W3097677712 cites W2145963399 @default.
- W3097677712 cites W2164237530 @default.
- W3097677712 cites W2166421740 @default.
- W3097677712 cites W2565415113 @default.
- W3097677712 cites W2949801043 @default.
- W3097677712 cites W52235041 @default.
- W3097677712 doi "https://doi.org/10.1016/j.jiec.2020.10.029" @default.
- W3097677712 hasPublicationYear "2021" @default.
- W3097677712 type Work @default.
- W3097677712 sameAs 3097677712 @default.
- W3097677712 citedByCount "11" @default.
- W3097677712 countsByYear W30976777122021 @default.
- W3097677712 countsByYear W30976777122022 @default.
- W3097677712 countsByYear W30976777122023 @default.
- W3097677712 crossrefType "journal-article" @default.
- W3097677712 hasAuthorship W3097677712A5006119791 @default.
- W3097677712 hasAuthorship W3097677712A5034954470 @default.
- W3097677712 hasAuthorship W3097677712A5086470278 @default.
- W3097677712 hasAuthorship W3097677712A5091061776 @default.
- W3097677712 hasBestOaLocation W30976777121 @default.
- W3097677712 hasConcept C104779481 @default.
- W3097677712 hasConcept C120024216 @default.
- W3097677712 hasConcept C121332964 @default.
- W3097677712 hasConcept C124681953 @default.
- W3097677712 hasConcept C127413603 @default.
- W3097677712 hasConcept C140205800 @default.
- W3097677712 hasConcept C151730666 @default.
- W3097677712 hasConcept C159985019 @default.
- W3097677712 hasConcept C171250308 @default.
- W3097677712 hasConcept C175721412 @default.
- W3097677712 hasConcept C178790620 @default.
- W3097677712 hasConcept C185592680 @default.
- W3097677712 hasConcept C191897082 @default.
- W3097677712 hasConcept C192562407 @default.
- W3097677712 hasConcept C2780722187 @default.
- W3097677712 hasConcept C2816523 @default.
- W3097677712 hasConcept C38347018 @default.
- W3097677712 hasConcept C39353612 @default.
- W3097677712 hasConcept C42360764 @default.
- W3097677712 hasConcept C512968161 @default.
- W3097677712 hasConcept C544956773 @default.
- W3097677712 hasConcept C57410435 @default.
- W3097677712 hasConcept C64297162 @default.
- W3097677712 hasConcept C6648577 @default.
- W3097677712 hasConcept C86803240 @default.
- W3097677712 hasConcept C97355855 @default.
- W3097677712 hasConceptScore W3097677712C104779481 @default.
- W3097677712 hasConceptScore W3097677712C120024216 @default.
- W3097677712 hasConceptScore W3097677712C121332964 @default.
- W3097677712 hasConceptScore W3097677712C124681953 @default.
- W3097677712 hasConceptScore W3097677712C127413603 @default.
- W3097677712 hasConceptScore W3097677712C140205800 @default.
- W3097677712 hasConceptScore W3097677712C151730666 @default.
- W3097677712 hasConceptScore W3097677712C159985019 @default.