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- W3098565963 abstract "We have developed a near-field scanned microwave probe with a sampling volume of approximately 10μm in diameter, which is the smallest one achieved in near-field microwave microscopy. This volume is defined to confine >99% of the probe’s net sampling reactive energy, thus making the response virtually independent of the sample properties outside of this region. The probe is formed by a 4GHz balanced stripline resonator tapered down to a few-micrometer tip size and provides noncontact, noninvasive measurement capability. It is uniquely suited for spatially localized electrical metrology applications, such as evaluation of Cu/low-k interconnects on semiconductor production wafers." @default.
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- W3098565963 date "2006-03-27" @default.
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- W3098565963 title "A near-field scanned microwave probe for spatially localized electrical metrology" @default.
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- W3098565963 doi "https://doi.org/10.1063/1.2189147" @default.
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