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- W3100010157 abstract "In this work, Film Bulk Acoustic Resonators (FBAR) based on 250 nm-thick Y+163°-cut LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> films have been fabricated using a layer transfer process (4-inch) including patterned bottom electrodes and a sacrificial layer cavity. As previously reported, this orientation provides a single resonance, whose frequency is here pushed up to 4.78 GHz due to the reduced piezoelectric film thickness. The effective electromechanical coupling factor (kt <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ) reaches 17.6 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>%</sup> , and the quality factor at antiresonance (Qa) is around 200, leading to a Q×f product close to 900, which is slightly higher than previous realizations at 2.5 GHz [1]. This result demonstrates a first step towards introducing LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> as an alternative to AlN for sub-6 GHz BAW filters." @default.
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- W3100010157 date "2020-09-07" @default.
- W3100010157 modified "2023-10-11" @default.
- W3100010157 title "Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters" @default.
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- W3100010157 doi "https://doi.org/10.1109/ius46767.2020.9251654" @default.
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