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- W3100108623 abstract "Self-aligned double patterning (SADP) has become a promising technique to push pattern resolution limit to sub-22nm technology node. Although SADP provides good overlay controllability, it encounters many challenges in physical design stages to obtain conflict-free layout decomposition. In this paper, we study the impact on placement by different standard cell layout decomposition strategies. We propose a SADP friendly standard cell configuration which provides pre-coloring results for standard cells. These configurations are brought into the placement stage to help ensure layout decomposability and save the extra effort for solving conflicts in later stages." @default.
- W3100108623 created "2020-11-23" @default.
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- W3100108623 date "2013-03-29" @default.
- W3100108623 modified "2023-10-16" @default.
- W3100108623 title "Self-aligned double patterning friendly configuration for standard cell library considering placement impact" @default.
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- W3100108623 doi "https://doi.org/10.1117/12.2011660" @default.
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