Matches in SemOpenAlex for { <https://semopenalex.org/work/W3100521978> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W3100521978 abstract "Abstract : During this three-year granting period, this growth and characterization of high purity and high quality Beta-SiC thin films has reached a highly sophisticated level. This report details the CVD growth and in situ doping and the thermodynamic considerations thereof as well as ion implantation; SIMS, TEM, Auger, Raman and electrical characterization; ohmic contact studies; oxidation experiments and the fabrication of Schottky barrier diodes and p-n junctions. Originator-supplied keywords include: Silicon carbide, Chemical Vapor Deposition, Electronic Materials, In Situ Doping, Ion Implantation, Thermodynamics, EM, Secondary Ion Mass Spectroscopy, Electrical Properties, Raman Spectroscopy, Oxidation, Schottky Diode, P-N Junction, MOS Device." @default.
- W3100521978 created "2020-11-23" @default.
- W3100521978 creator A5020458678 @default.
- W3100521978 creator A5083293297 @default.
- W3100521978 date "1983-03-01" @default.
- W3100521978 modified "2023-09-27" @default.
- W3100521978 title "Fundamental studies of growth, doping and transformation in beta silicon carbide" @default.
- W3100521978 hasPublicationYear "1983" @default.
- W3100521978 type Work @default.
- W3100521978 sameAs 3100521978 @default.
- W3100521978 citedByCount "0" @default.
- W3100521978 crossrefType "journal-article" @default.
- W3100521978 hasAuthorship W3100521978A5020458678 @default.
- W3100521978 hasAuthorship W3100521978A5083293297 @default.
- W3100521978 hasConcept C113196181 @default.
- W3100521978 hasConcept C120665830 @default.
- W3100521978 hasConcept C121332964 @default.
- W3100521978 hasConcept C138230450 @default.
- W3100521978 hasConcept C145148216 @default.
- W3100521978 hasConcept C16115445 @default.
- W3100521978 hasConcept C171250308 @default.
- W3100521978 hasConcept C178790620 @default.
- W3100521978 hasConcept C185544564 @default.
- W3100521978 hasConcept C185592680 @default.
- W3100521978 hasConcept C191897082 @default.
- W3100521978 hasConcept C192562407 @default.
- W3100521978 hasConcept C205200001 @default.
- W3100521978 hasConcept C25442681 @default.
- W3100521978 hasConcept C2779227376 @default.
- W3100521978 hasConcept C2780722187 @default.
- W3100521978 hasConcept C40003534 @default.
- W3100521978 hasConcept C41823505 @default.
- W3100521978 hasConcept C43617362 @default.
- W3100521978 hasConcept C49040817 @default.
- W3100521978 hasConcept C544956773 @default.
- W3100521978 hasConcept C57410435 @default.
- W3100521978 hasConcept C57863236 @default.
- W3100521978 hasConcept C78434282 @default.
- W3100521978 hasConceptScore W3100521978C113196181 @default.
- W3100521978 hasConceptScore W3100521978C120665830 @default.
- W3100521978 hasConceptScore W3100521978C121332964 @default.
- W3100521978 hasConceptScore W3100521978C138230450 @default.
- W3100521978 hasConceptScore W3100521978C145148216 @default.
- W3100521978 hasConceptScore W3100521978C16115445 @default.
- W3100521978 hasConceptScore W3100521978C171250308 @default.
- W3100521978 hasConceptScore W3100521978C178790620 @default.
- W3100521978 hasConceptScore W3100521978C185544564 @default.
- W3100521978 hasConceptScore W3100521978C185592680 @default.
- W3100521978 hasConceptScore W3100521978C191897082 @default.
- W3100521978 hasConceptScore W3100521978C192562407 @default.
- W3100521978 hasConceptScore W3100521978C205200001 @default.
- W3100521978 hasConceptScore W3100521978C25442681 @default.
- W3100521978 hasConceptScore W3100521978C2779227376 @default.
- W3100521978 hasConceptScore W3100521978C2780722187 @default.
- W3100521978 hasConceptScore W3100521978C40003534 @default.
- W3100521978 hasConceptScore W3100521978C41823505 @default.
- W3100521978 hasConceptScore W3100521978C43617362 @default.
- W3100521978 hasConceptScore W3100521978C49040817 @default.
- W3100521978 hasConceptScore W3100521978C544956773 @default.
- W3100521978 hasConceptScore W3100521978C57410435 @default.
- W3100521978 hasConceptScore W3100521978C57863236 @default.
- W3100521978 hasConceptScore W3100521978C78434282 @default.
- W3100521978 hasLocation W31005219781 @default.
- W3100521978 hasOpenAccess W3100521978 @default.
- W3100521978 hasPrimaryLocation W31005219781 @default.
- W3100521978 hasRelatedWork W1965438975 @default.
- W3100521978 hasRelatedWork W1999871243 @default.
- W3100521978 hasRelatedWork W2076975516 @default.
- W3100521978 hasRelatedWork W2093071207 @default.
- W3100521978 hasRelatedWork W2115634469 @default.
- W3100521978 hasRelatedWork W2136264774 @default.
- W3100521978 hasRelatedWork W2171877724 @default.
- W3100521978 hasRelatedWork W2489054658 @default.
- W3100521978 hasRelatedWork W3018977750 @default.
- W3100521978 hasRelatedWork W3100955304 @default.
- W3100521978 hasRelatedWork W3104462015 @default.
- W3100521978 hasRelatedWork W3114530802 @default.
- W3100521978 hasRelatedWork W3128771012 @default.
- W3100521978 hasRelatedWork W3142424117 @default.
- W3100521978 hasRelatedWork W3202589160 @default.
- W3100521978 hasRelatedWork W3208733448 @default.
- W3100521978 hasRelatedWork W328874545 @default.
- W3100521978 hasRelatedWork W80312270 @default.
- W3100521978 hasRelatedWork W816533039 @default.
- W3100521978 hasRelatedWork W1849470040 @default.
- W3100521978 isParatext "false" @default.
- W3100521978 isRetracted "false" @default.
- W3100521978 magId "3100521978" @default.
- W3100521978 workType "article" @default.