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- W3100558182 abstract "We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation, a stress variation of up to 50% is observed. This enables fine tuning of the tensile stress for any given Ga content x, which implies interesting prospects for the study of high Q nanomechanical systems." @default.
- W3100558182 created "2020-11-23" @default.
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- W3100558182 date "2018-11-12" @default.
- W3100558182 modified "2023-10-17" @default.
- W3100558182 title "Stress control of tensile-strained In1−<i>x</i>Ga<i>x</i>P nanomechanical string resonators" @default.
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- W3100558182 doi "https://doi.org/10.1063/1.5054076" @default.
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