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• W3100595416 abstract "We present a monolithic integrated aluminum nitride (AlN) optomechanical resonator in which the mechanical motion is actuated by piezoelectric force and the displacement is transduced by a high-Q optical cavity. The AlN optomechanical resonator is excited from a radio-frequency electrode via a small air gap to eliminate resonator-to-electrode loss. We observe the electrically excited mechanical motion at 47.3 MHz, 1.04 GHz, and 3.12 GHz, corresponding to the 1st, 2nd, and 4th radial-contour mode of the wheel resonator, respectively. An equivalent circuit model is developed to describe the observed Fano-like resonance spectrum." @default.
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• W3100595416 date "2013-01-14" @default.
• W3100595416 modified "2023-10-14" @default.
• W3100595416 title "Cavity piezooptomechanics: Piezoelectrically excited, optically transduced optomechanical resonators" @default.
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• W3100595416 doi "https://doi.org/10.1063/1.4788724" @default.
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