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• W3100756086 abstract "We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 105 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical properties of the membrane." @default.
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• W3100756086 date "2012-02-06" @default.
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• W3100756086 title "Mechanically compliant grating reflectors for optomechanics" @default.
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• W3100756086 doi "https://doi.org/10.1063/1.3684248" @default.
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