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- W3102425255 abstract "A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge landscape. This technique involves coordinate transformation from displacement to charge, thereby formulating the Hamiltonian of electrostatic MEMS actuators in terms of charge. We investigate the use of the energy-charge landscape to analyze static pull-in, dynamic pull-in, and pull-out phenomena. The voltage expressions derived using this method are identical with those derived using the conventional energy-displacement landscape. In addition, we also obtain the expressions for charge under static and dynamic pull-in conditions. This work can aid in the design and analysis of electrostatic MEMS devices. As a case study, the analysis of a feedback capacitor-MEMS actuator system is presented to illustrate the application of the energy-charge landscape." @default.
- W3102425255 created "2020-11-23" @default.
- W3102425255 creator A5030219139 @default.
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- W3102425255 date "2020-10-01" @default.
- W3102425255 modified "2023-09-26" @default.
- W3102425255 title "Analysis of Electrostatic MEMS Using Energy-Charge Landscape" @default.
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- W3102425255 doi "https://doi.org/10.1109/ted.2020.3018700" @default.
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