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Matches in SemOpenAlex for { <https://semopenalex.org/work/W3102920400> ?p ?o ?g. }

• W3102920400 abstract "A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications." @default.
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• W3102920400 date "2013-04-10" @default.
• W3102920400 modified "2023-09-27" @default.
• W3102920400 title "Fast simulation method for parameter reconstruction in optical metrology" @default.
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• W3102920400 doi "https://doi.org/10.1117/12.2011154" @default.
• W3102920400 hasPublicationYear "2013" @default.
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