Matches in SemOpenAlex for { <https://semopenalex.org/work/W3103071869> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W3103071869 endingPage "3030" @default.
- W3103071869 startingPage "3025" @default.
- W3103071869 abstract "Sputter thin film deposition after photolithography often produces unwanted spikes along the side edges. These spikes are a significant issue for the development of magnetic tunnel junction (MTJ)-based memory and molecular spintronics devices, microelectronics, and micro-electro-mechanical systems because they influence the properties of the other films deposited on the top. Our molecular spintronics devices that utilize MTJ as the testbed are almost short-lived and encountered high background current that masked the effect of molecular transport channels placed along the sides of MTJs. Therefore, tapered thin film edges are critically needed in devices. Here, we report a very cost-efficient and fast way of creating an optimum photoresist profile for the production of spike-free patterned films. This approach is based on performing a soaking in the photoresist developer after baking and before the UV exposure. However, the success of this method depends on multiple factors accounted for during photolithography - photoresist thickness (spin speed), baking temperature, soaking time and exposure time. Our recent experiments systematically studied the effect of these factors by following the L9 experimental scheme of the Taguchi Design of the experiment (TDOE). We discovered that baking temperature was the most influential parameter; presoak time and photoresist thickness were two other influential factors; exposure time was the least effective factor. We also found that 4000 rpm, 100 C soft baking, 60 s soaking, and 15 s UV exposure yielded the best results. Finally, the paper also discusses the interdependence of selected factors, and the impact of the individual levels of each factor. This study is expected to benefit MEMS and micro/nanoelectronics device researchers because it attempts at finding a cheaper and faster alternative to creating an optimum photoresist profile." @default.
- W3103071869 created "2020-11-23" @default.
- W3103071869 creator A5009731428 @default.
- W3103071869 creator A5012531835 @default.
- W3103071869 creator A5016033166 @default.
- W3103071869 creator A5028706306 @default.
- W3103071869 creator A5062268576 @default.
- W3103071869 creator A5070990614 @default.
- W3103071869 date "2017-01-01" @default.
- W3103071869 modified "2023-09-26" @default.
- W3103071869 title "Taguchi Design of Experiment Enabling the Reduction of Spikes on the Sides of Patterned Thin Films for Tunnel Junction Fabrication" @default.
- W3103071869 cites W1974474632 @default.
- W3103071869 cites W1985660168 @default.
- W3103071869 cites W2012973477 @default.
- W3103071869 cites W2016089568 @default.
- W3103071869 cites W2037409975 @default.
- W3103071869 cites W2061193920 @default.
- W3103071869 cites W2088973124 @default.
- W3103071869 cites W2123183618 @default.
- W3103071869 cites W2127278606 @default.
- W3103071869 cites W2172838120 @default.
- W3103071869 cites W2301859506 @default.
- W3103071869 doi "https://doi.org/10.1557/adv.2017.456" @default.
- W3103071869 hasPublicationYear "2017" @default.
- W3103071869 type Work @default.
- W3103071869 sameAs 3103071869 @default.
- W3103071869 citedByCount "1" @default.
- W3103071869 countsByYear W31030718692020 @default.
- W3103071869 crossrefType "journal-article" @default.
- W3103071869 hasAuthorship W3103071869A5009731428 @default.
- W3103071869 hasAuthorship W3103071869A5012531835 @default.
- W3103071869 hasAuthorship W3103071869A5016033166 @default.
- W3103071869 hasAuthorship W3103071869A5028706306 @default.
- W3103071869 hasAuthorship W3103071869A5062268576 @default.
- W3103071869 hasAuthorship W3103071869A5070990614 @default.
- W3103071869 hasBestOaLocation W31030718692 @default.
- W3103071869 hasConcept C105487726 @default.
- W3103071869 hasConcept C121332964 @default.
- W3103071869 hasConcept C134406635 @default.
- W3103071869 hasConcept C136525101 @default.
- W3103071869 hasConcept C142724271 @default.
- W3103071869 hasConcept C159985019 @default.
- W3103071869 hasConcept C171250308 @default.
- W3103071869 hasConcept C187937830 @default.
- W3103071869 hasConcept C19067145 @default.
- W3103071869 hasConcept C192191005 @default.
- W3103071869 hasConcept C192562407 @default.
- W3103071869 hasConcept C204787440 @default.
- W3103071869 hasConcept C207999682 @default.
- W3103071869 hasConcept C2778596170 @default.
- W3103071869 hasConcept C2779227376 @default.
- W3103071869 hasConcept C49040817 @default.
- W3103071869 hasConcept C62520636 @default.
- W3103071869 hasConcept C71924100 @default.
- W3103071869 hasConcept C82217956 @default.
- W3103071869 hasConcept C83469408 @default.
- W3103071869 hasConceptScore W3103071869C105487726 @default.
- W3103071869 hasConceptScore W3103071869C121332964 @default.
- W3103071869 hasConceptScore W3103071869C134406635 @default.
- W3103071869 hasConceptScore W3103071869C136525101 @default.
- W3103071869 hasConceptScore W3103071869C142724271 @default.
- W3103071869 hasConceptScore W3103071869C159985019 @default.
- W3103071869 hasConceptScore W3103071869C171250308 @default.
- W3103071869 hasConceptScore W3103071869C187937830 @default.
- W3103071869 hasConceptScore W3103071869C19067145 @default.
- W3103071869 hasConceptScore W3103071869C192191005 @default.
- W3103071869 hasConceptScore W3103071869C192562407 @default.
- W3103071869 hasConceptScore W3103071869C204787440 @default.
- W3103071869 hasConceptScore W3103071869C207999682 @default.
- W3103071869 hasConceptScore W3103071869C2778596170 @default.
- W3103071869 hasConceptScore W3103071869C2779227376 @default.
- W3103071869 hasConceptScore W3103071869C49040817 @default.
- W3103071869 hasConceptScore W3103071869C62520636 @default.
- W3103071869 hasConceptScore W3103071869C71924100 @default.
- W3103071869 hasConceptScore W3103071869C82217956 @default.
- W3103071869 hasConceptScore W3103071869C83469408 @default.
- W3103071869 hasIssue "52" @default.
- W3103071869 hasLocation W31030718691 @default.
- W3103071869 hasLocation W31030718692 @default.
- W3103071869 hasLocation W31030718693 @default.
- W3103071869 hasOpenAccess W3103071869 @default.
- W3103071869 hasPrimaryLocation W31030718691 @default.
- W3103071869 hasRelatedWork W1551102922 @default.
- W3103071869 hasRelatedWork W2055322925 @default.
- W3103071869 hasRelatedWork W2279318584 @default.
- W3103071869 hasRelatedWork W2483518727 @default.
- W3103071869 hasRelatedWork W2489430272 @default.
- W3103071869 hasRelatedWork W2766536564 @default.
- W3103071869 hasRelatedWork W2975304405 @default.
- W3103071869 hasRelatedWork W3016625011 @default.
- W3103071869 hasRelatedWork W3103071869 @default.
- W3103071869 hasRelatedWork W2706144254 @default.
- W3103071869 hasVolume "2" @default.
- W3103071869 isParatext "false" @default.
- W3103071869 isRetracted "false" @default.
- W3103071869 magId "3103071869" @default.
- W3103071869 workType "article" @default.