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- W3103075130 abstract "The mechanical strength of ultra-thin 100 μm Si wafers was measured depending on Si growing methods and machining modes of wafer surface preparation (abrasive grinding, diamond paste polishing, chemical-mechanical polishing — CMP)" @default.
- W3103075130 created "2020-11-23" @default.
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- W3103075130 date "2020-09-09" @default.
- W3103075130 modified "2023-09-26" @default.
- W3103075130 title "INVESTIGATION OF ULTRA-THIN SILICON WAFERS STRENGTH DEPENDING ON WAFER MATERIAL GROWING METHODS AND SURFACE TREATMENT" @default.
- W3103075130 doi "https://doi.org/10.29003/m1556.silicon-2020/59-61" @default.
- W3103075130 hasPublicationYear "2020" @default.
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