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• W3103389968 abstract "Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs." @default.
• W3103389968 created "2020-11-23" @default.
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• W3103389968 date "2015-03-19" @default.
• W3103389968 modified "2023-09-27" @default.
• W3103389968 title "Hp-finite element method for simulating light scattering from complex 3D structures" @default.
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• W3103389968 doi "https://doi.org/10.1117/12.2085795" @default.
• W3103389968 hasPublicationYear "2015" @default.
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