Matches in SemOpenAlex for { <https://semopenalex.org/work/W3103585761> ?p ?o ?g. }
- W3103585761 endingPage "18949" @default.
- W3103585761 startingPage "18943" @default.
- W3103585761 abstract "Chemical vapor deposition (CVD) is a powerful method employed for high quality monolayer crystal growth of 2D transition metal dichalcogenides with much effort invested toward improving the growth process. Here, we report a novel method for CVD based growth of monolayer molybdenum disulfide (MoS2) by using thermally evaporated thin films of molybdenum trioxide (MoO3) as the molybdenum (Mo) source for co-evaporation. Uniform evaporation rate of the MoO3 thin films provides uniform Mo vapor which promotes highly reproducible single crystal growth of MoS2 throughout the substrate. These high-quality crystals are as large as 95 um and were characterized by scanning electron microscopy, Raman spectroscopy, photoluminescence spectroscopy, atomic force microscopy and transmission electron microscopy. The bottom gated field effect transistors fabricated using the as grown single crystals show n-type transistor behavior with a good on/off ratio of 10^6 under ambient condition. Our results presented here addresses the precursor vapor control during the CVD process and is a major step forward toward reproducible growth of MoS2 for future semiconductor device applications." @default.
- W3103585761 created "2020-11-23" @default.
- W3103585761 creator A5034213624 @default.
- W3103585761 creator A5047887142 @default.
- W3103585761 creator A5050315624 @default.
- W3103585761 creator A5065575152 @default.
- W3103585761 creator A5081293151 @default.
- W3103585761 creator A5062898096 @default.
- W3103585761 date "2018-12-31" @default.
- W3103585761 modified "2023-10-10" @default.
- W3103585761 title "Uniform Vapor-Pressure-Based Chemical Vapor Deposition Growth of MoS<sub>2</sub> Using MoO<sub>3</sub> Thin Film as a Precursor for Coevaporation" @default.
- W3103585761 cites W1969314684 @default.
- W3103585761 cites W1974326957 @default.
- W3103585761 cites W1987145869 @default.
- W3103585761 cites W2017871657 @default.
- W3103585761 cites W2021994802 @default.
- W3103585761 cites W2029116464 @default.
- W3103585761 cites W2047331480 @default.
- W3103585761 cites W2053081018 @default.
- W3103585761 cites W2078204579 @default.
- W3103585761 cites W2079591655 @default.
- W3103585761 cites W2079851049 @default.
- W3103585761 cites W2141297982 @default.
- W3103585761 cites W2150782946 @default.
- W3103585761 cites W2151949892 @default.
- W3103585761 cites W2157876253 @default.
- W3103585761 cites W2165376634 @default.
- W3103585761 cites W2261852134 @default.
- W3103585761 cites W2290594521 @default.
- W3103585761 cites W2297749073 @default.
- W3103585761 cites W2314312519 @default.
- W3103585761 cites W2316629727 @default.
- W3103585761 cites W2318643277 @default.
- W3103585761 cites W2325999434 @default.
- W3103585761 cites W2327342749 @default.
- W3103585761 cites W2328616503 @default.
- W3103585761 cites W2345737486 @default.
- W3103585761 cites W2346011394 @default.
- W3103585761 cites W2395705820 @default.
- W3103585761 cites W2403937785 @default.
- W3103585761 cites W2471908238 @default.
- W3103585761 cites W2509403552 @default.
- W3103585761 cites W2528017612 @default.
- W3103585761 cites W2537932496 @default.
- W3103585761 cites W2559269162 @default.
- W3103585761 cites W2735662311 @default.
- W3103585761 cites W2752505913 @default.
- W3103585761 cites W2758419140 @default.
- W3103585761 cites W2778094403 @default.
- W3103585761 cites W2803611731 @default.
- W3103585761 cites W2890648833 @default.
- W3103585761 cites W2891994738 @default.
- W3103585761 cites W2962878147 @default.
- W3103585761 cites W3101032984 @default.
- W3103585761 cites W3101929953 @default.
- W3103585761 cites W3105426776 @default.
- W3103585761 doi "https://doi.org/10.1021/acsomega.8b02978" @default.
- W3103585761 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6643554" @default.
- W3103585761 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/31458458" @default.
- W3103585761 hasPublicationYear "2018" @default.
- W3103585761 type Work @default.
- W3103585761 sameAs 3103585761 @default.
- W3103585761 citedByCount "24" @default.
- W3103585761 countsByYear W31035857612019 @default.
- W3103585761 countsByYear W31035857612020 @default.
- W3103585761 countsByYear W31035857612021 @default.
- W3103585761 countsByYear W31035857612022 @default.
- W3103585761 countsByYear W31035857612023 @default.
- W3103585761 crossrefType "journal-article" @default.
- W3103585761 hasAuthorship W3103585761A5034213624 @default.
- W3103585761 hasAuthorship W3103585761A5047887142 @default.
- W3103585761 hasAuthorship W3103585761A5050315624 @default.
- W3103585761 hasAuthorship W3103585761A5062898096 @default.
- W3103585761 hasAuthorship W3103585761A5065575152 @default.
- W3103585761 hasAuthorship W3103585761A5081293151 @default.
- W3103585761 hasBestOaLocation W31035857611 @default.
- W3103585761 hasConcept C111368507 @default.
- W3103585761 hasConcept C113196181 @default.
- W3103585761 hasConcept C120665830 @default.
- W3103585761 hasConcept C121332964 @default.
- W3103585761 hasConcept C127313418 @default.
- W3103585761 hasConcept C127413603 @default.
- W3103585761 hasConcept C146088050 @default.
- W3103585761 hasConcept C159985019 @default.
- W3103585761 hasConcept C171250308 @default.
- W3103585761 hasConcept C178790620 @default.
- W3103585761 hasConcept C185592680 @default.
- W3103585761 hasConcept C19067145 @default.
- W3103585761 hasConcept C191897082 @default.
- W3103585761 hasConcept C192562407 @default.
- W3103585761 hasConcept C199360897 @default.
- W3103585761 hasConcept C26456737 @default.
- W3103585761 hasConcept C26771246 @default.
- W3103585761 hasConcept C2777289219 @default.
- W3103585761 hasConcept C2780091738 @default.
- W3103585761 hasConcept C2780423959 @default.
- W3103585761 hasConcept C2781285689 @default.
- W3103585761 hasConcept C40003534 @default.