Matches in SemOpenAlex for { <https://semopenalex.org/work/W3105209454> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W3105209454 abstract "ScAlN films are known to have piezoelectric properties much larger than AlN films and can be deposited using a RF magnetron sputtering method. In general, sputtering deposition at low gas pressure improves the film quality, because increasing mean free path of sputtered particles results in reducing their thermalization and scattering. However, negative ion bombardment to the substrate increase at low pressure. We have previously shown that carbon and oxygen impurities in the Sc ingots cause negative ion bombardment, which degrades the piezoelectric properties of ScAlN films. In this study, we have demonstrated that the piezoelectric properties of ScAlN films are deteriorated by the negative ion bombardment increased in low-pressure sputtering deposition." @default.
- W3105209454 created "2020-11-23" @default.
- W3105209454 creator A5020069125 @default.
- W3105209454 creator A5033531036 @default.
- W3105209454 creator A5089744443 @default.
- W3105209454 date "2020-09-07" @default.
- W3105209454 modified "2023-10-16" @default.
- W3105209454 title "Deterioration in the piezoelectric property of ScAlN thin films by negative ion bombardment increased in low-pressure sputtering deposition" @default.
- W3105209454 cites W1987528942 @default.
- W3105209454 cites W2037516085 @default.
- W3105209454 cites W2075174131 @default.
- W3105209454 cites W2078539889 @default.
- W3105209454 cites W2094893736 @default.
- W3105209454 cites W2148937496 @default.
- W3105209454 cites W2149961875 @default.
- W3105209454 cites W2547181780 @default.
- W3105209454 cites W2770294459 @default.
- W3105209454 cites W2994730416 @default.
- W3105209454 doi "https://doi.org/10.1109/ius46767.2020.9251438" @default.
- W3105209454 hasPublicationYear "2020" @default.
- W3105209454 type Work @default.
- W3105209454 sameAs 3105209454 @default.
- W3105209454 citedByCount "0" @default.
- W3105209454 crossrefType "proceedings-article" @default.
- W3105209454 hasAuthorship W3105209454A5020069125 @default.
- W3105209454 hasAuthorship W3105209454A5033531036 @default.
- W3105209454 hasAuthorship W3105209454A5089744443 @default.
- W3105209454 hasConcept C100082104 @default.
- W3105209454 hasConcept C111368507 @default.
- W3105209454 hasConcept C113196181 @default.
- W3105209454 hasConcept C127313418 @default.
- W3105209454 hasConcept C145148216 @default.
- W3105209454 hasConcept C151730666 @default.
- W3105209454 hasConcept C159985019 @default.
- W3105209454 hasConcept C171250308 @default.
- W3105209454 hasConcept C178790620 @default.
- W3105209454 hasConcept C185592680 @default.
- W3105209454 hasConcept C19067145 @default.
- W3105209454 hasConcept C192562407 @default.
- W3105209454 hasConcept C22423302 @default.
- W3105209454 hasConcept C2777289219 @default.
- W3105209454 hasConcept C2816523 @default.
- W3105209454 hasConcept C43617362 @default.
- W3105209454 hasConcept C49040817 @default.
- W3105209454 hasConcept C61427134 @default.
- W3105209454 hasConcept C64297162 @default.
- W3105209454 hasConcept C71987851 @default.
- W3105209454 hasConcept C86803240 @default.
- W3105209454 hasConceptScore W3105209454C100082104 @default.
- W3105209454 hasConceptScore W3105209454C111368507 @default.
- W3105209454 hasConceptScore W3105209454C113196181 @default.
- W3105209454 hasConceptScore W3105209454C127313418 @default.
- W3105209454 hasConceptScore W3105209454C145148216 @default.
- W3105209454 hasConceptScore W3105209454C151730666 @default.
- W3105209454 hasConceptScore W3105209454C159985019 @default.
- W3105209454 hasConceptScore W3105209454C171250308 @default.
- W3105209454 hasConceptScore W3105209454C178790620 @default.
- W3105209454 hasConceptScore W3105209454C185592680 @default.
- W3105209454 hasConceptScore W3105209454C19067145 @default.
- W3105209454 hasConceptScore W3105209454C192562407 @default.
- W3105209454 hasConceptScore W3105209454C22423302 @default.
- W3105209454 hasConceptScore W3105209454C2777289219 @default.
- W3105209454 hasConceptScore W3105209454C2816523 @default.
- W3105209454 hasConceptScore W3105209454C43617362 @default.
- W3105209454 hasConceptScore W3105209454C49040817 @default.
- W3105209454 hasConceptScore W3105209454C61427134 @default.
- W3105209454 hasConceptScore W3105209454C64297162 @default.
- W3105209454 hasConceptScore W3105209454C71987851 @default.
- W3105209454 hasConceptScore W3105209454C86803240 @default.
- W3105209454 hasLocation W31052094541 @default.
- W3105209454 hasOpenAccess W3105209454 @default.
- W3105209454 hasPrimaryLocation W31052094541 @default.
- W3105209454 hasRelatedWork W13837371 @default.
- W3105209454 hasRelatedWork W1426046 @default.
- W3105209454 hasRelatedWork W21930547 @default.
- W3105209454 hasRelatedWork W23645192 @default.
- W3105209454 hasRelatedWork W2744555 @default.
- W3105209454 hasRelatedWork W32285903 @default.
- W3105209454 hasRelatedWork W35087920 @default.
- W3105209454 hasRelatedWork W36072078 @default.
- W3105209454 hasRelatedWork W49729008 @default.
- W3105209454 hasRelatedWork W7640012 @default.
- W3105209454 isParatext "false" @default.
- W3105209454 isRetracted "false" @default.
- W3105209454 magId "3105209454" @default.
- W3105209454 workType "article" @default.