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• W3105517958 startingPage "023510" @default.
• W3105517958 abstract "A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside observed bandgaps the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB." @default.
• W3105517958 created "2020-11-23" @default.
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• W3105517958 date "2014-01-13" @default.
• W3105517958 modified "2023-09-30" @default.
• W3105517958 title "A phononic bandgap shield for high-<i>Q</i> membrane microresonators" @default.
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• W3105517958 doi "https://doi.org/10.1063/1.4862031" @default.
• W3105517958 hasPublicationYear "2014" @default.
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