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- W3106759161 abstract "Abstract Surface preparation is an integral part of any thin film deposition process. As the technological demands on films and coatings increase, the need for better and more reproducible surface preparation techniques is also increased. There is a wide variety of approaches to surface preparation and each film-substrate couple and function require specific development. This paper outlines the problems to be considered and some general approaches to surface preparation technologies." @default.
- W3106759161 created "2020-12-07" @default.
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- W3106759161 date "1984-01-01" @default.
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- W3106759161 title "Substrate preparation for thin film deposition: A survey" @default.
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