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• W3110597662 abstract "Buried power rail (BPR) is a key scaling booster for CMOS extension beyond the 5 nm node. This paper demonstrates, for the first time, the integration of tungsten (W) BPR lines with Si finFETs. The characteristics of CMOS in close proximity to floating BPR are found to be similar to the characteristics of CMOS without BPR. Moreover, W-BPR interface with Ru via contact can withstand more than 320 h of electromigration (EM) stress at 4 MA/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> and 330°C, making Ru a candidate for via metallization to achieve low resistance contact strategy to BPR." @default.
• W3110597662 created "2020-12-07" @default.
• W3110597662 creator A5000328835 @default.
• W3110597662 creator A5002588402 @default.
• W3110597662 creator A5007704072 @default.
• W3110597662 creator A5012137926 @default.
• W3110597662 creator A5012984113 @default.
• W3110597662 creator A5018168075 @default.
• W3110597662 creator A5018173806 @default.
• W3110597662 creator A5018955596 @default.
• W3110597662 creator A5019939070 @default.
• W3110597662 creator A5020622600 @default.
• W3110597662 creator A5021601372 @default.
• W3110597662 creator A5022011642 @default.
• W3110597662 creator A5022337178 @default.
• W3110597662 creator A5022927858 @default.
• W3110597662 creator A5027991041 @default.
• W3110597662 creator A5028915592 @default.
• W3110597662 creator A5029225444 @default.
• W3110597662 creator A5029989684 @default.
• W3110597662 creator A5030240140 @default.
• W3110597662 creator A5033202795 @default.
• W3110597662 creator A5033858378 @default.
• W3110597662 creator A5033966941 @default.
• W3110597662 creator A5035398207 @default.
• W3110597662 creator A5035830232 @default.
• W3110597662 creator A5039544876 @default.
• W3110597662 creator A5042030541 @default.
• W3110597662 creator A5044005800 @default.
• W3110597662 creator A5044158491 @default.
• W3110597662 creator A5047236007 @default.
• W3110597662 creator A5047576640 @default.
• W3110597662 creator A5047581696 @default.
• W3110597662 creator A5048002552 @default.
• W3110597662 creator A5049232971 @default.
• W3110597662 creator A5053724730 @default.
• W3110597662 creator A5055896171 @default.
• W3110597662 creator A5056543688 @default.
• W3110597662 creator A5059963322 @default.
• W3110597662 creator A5061145610 @default.
• W3110597662 creator A5062072211 @default.
• W3110597662 creator A5065113949 @default.
• W3110597662 creator A5066757334 @default.
• W3110597662 creator A5071436641 @default.
• W3110597662 creator A5074277744 @default.
• W3110597662 creator A5074551566 @default.
• W3110597662 creator A5074709658 @default.
• W3110597662 creator A5076508833 @default.
• W3110597662 creator A5079435576 @default.
• W3110597662 creator A5080909641 @default.
• W3110597662 creator A5081605462 @default.
• W3110597662 creator A5081956091 @default.
• W3110597662 creator A5082050068 @default.
• W3110597662 creator A5083191622 @default.
• W3110597662 creator A5083194625 @default.
• W3110597662 creator A5085687580 @default.
• W3110597662 creator A5085980922 @default.
• W3110597662 creator A5089497603 @default.
• W3110597662 creator A5090570441 @default.
• W3110597662 date "2020-06-01" @default.
• W3110597662 modified "2023-10-18" @default.
• W3110597662 title "Buried Power Rail Integration with Si FinFETs for CMOS Scaling beyond the 5 nm Node" @default.
• W3110597662 doi "https://doi.org/10.1109/vlsitechnology18217.2020.9265113" @default.
• W3110597662 hasPublicationYear "2020" @default.
• W3110597662 type Work @default.
• W3110597662 sameAs 3110597662 @default.
• W3110597662 citedByCount "7" @default.
• W3110597662 countsByYear W31105976622022 @default.
• W3110597662 countsByYear W31105976622023 @default.
• W3110597662 crossrefType "proceedings-article" @default.
• W3110597662 hasAuthorship W3110597662A5000328835 @default.
• W3110597662 hasAuthorship W3110597662A5002588402 @default.
• W3110597662 hasAuthorship W3110597662A5007704072 @default.
• W3110597662 hasAuthorship W3110597662A5012137926 @default.
• W3110597662 hasAuthorship W3110597662A5012984113 @default.
• W3110597662 hasAuthorship W3110597662A5018168075 @default.
• W3110597662 hasAuthorship W3110597662A5018173806 @default.
• W3110597662 hasAuthorship W3110597662A5018955596 @default.
• W3110597662 hasAuthorship W3110597662A5019939070 @default.
• W3110597662 hasAuthorship W3110597662A5020622600 @default.
• W3110597662 hasAuthorship W3110597662A5021601372 @default.
• W3110597662 hasAuthorship W3110597662A5022011642 @default.
• W3110597662 hasAuthorship W3110597662A5022337178 @default.
• W3110597662 hasAuthorship W3110597662A5022927858 @default.
• W3110597662 hasAuthorship W3110597662A5027991041 @default.
• W3110597662 hasAuthorship W3110597662A5028915592 @default.
• W3110597662 hasAuthorship W3110597662A5029225444 @default.
• W3110597662 hasAuthorship W3110597662A5029989684 @default.
• W3110597662 hasAuthorship W3110597662A5030240140 @default.
• W3110597662 hasAuthorship W3110597662A5033202795 @default.
• W3110597662 hasAuthorship W3110597662A5033858378 @default.
• W3110597662 hasAuthorship W3110597662A5033966941 @default.
• W3110597662 hasAuthorship W3110597662A5035398207 @default.
• W3110597662 hasAuthorship W3110597662A5035830232 @default.
• W3110597662 hasAuthorship W3110597662A5039544876 @default.
• W3110597662 hasAuthorship W3110597662A5042030541 @default.
• W3110597662 hasAuthorship W3110597662A5044005800 @default.
• W3110597662 hasAuthorship W3110597662A5044158491 @default.
• W3110597662 hasAuthorship W3110597662A5047236007 @default.
• W3110597662 hasAuthorship W3110597662A5047576640 @default.

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