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• W3111268589 abstract "In this study, we demonstrate a novel, to the best of our knowledge, integrated indium phosphide (InP) and silicon nitride ( <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>S</mml:mi> <mml:mi mathvariant=normal>i</mml:mi> </mml:mrow> <mml:mn>3</mml:mn> </mml:msub> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>N</mml:mi> </mml:mrow> <mml:mn>4</mml:mn> </mml:msub> </mml:math> ) waveguide platform, which is based on interlayer coupling, to achieve heterogeneous integration of a photodetector and waveguide ring resonator firstly. In order to improve the gyro bias stability, the <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>S</mml:mi> <mml:mi mathvariant=normal>i</mml:mi> </mml:mrow> <mml:mn>3</mml:mn> </mml:msub> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>N</mml:mi> </mml:mrow> <mml:mn>4</mml:mn> </mml:msub> </mml:math> and InP waveguides were designed with a high polarization extinction ratio and ultra-low loss. Three-dimensional finite difference time domain methods are used to optimize the InP taper dimensions to provide efficient optical coupling between the <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>S</mml:mi> <mml:mi mathvariant=normal>i</mml:mi> </mml:mrow> <mml:mn>3</mml:mn> </mml:msub> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>N</mml:mi> </mml:mrow> <mml:mn>4</mml:mn> </mml:msub> </mml:math> and InP waveguides. The optical coupler with a length of 100 µm is designed to achieve optical coupling between the <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>S</mml:mi> <mml:mi mathvariant=normal>i</mml:mi> </mml:mrow> <mml:mn>3</mml:mn> </mml:msub> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>N</mml:mi> </mml:mrow> <mml:mn>4</mml:mn> </mml:msub> </mml:math> and InP waveguides while maintaining its state of polarization all the way from the taper waveguides. The coupling efficiency of the optimized interlayer coupler has been improved to about 99.5%." @default.
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• W3111268589 date "2021-01-18" @default.
• W3111268589 modified "2023-09-24" @default.
• W3111268589 title "Heterogeneous integration of InP and Si₃N₄ waveguides based on interlayer coupling for an integrated optical gyroscope" @default.
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