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- W3111675225 abstract "We present an on-chip optoectromechanical phase shifter with low insertion loss and low half-wave voltage using a silicon nitride platform. The device is based on a slot waveguide in which the electrostatic displacement of mechanical structures results in a change of the effective refractive index. We achieve insertion loss below 0.5 dB at a wavelength of 1550 nm in a Mach-Zehnder Interferometer with an extinction ratio of 31 dB. With a phase tuning length of 210 µm, we demonstrate a half-wave voltage of V π = 2.0 V and a 2π phase shift at V 2π = 2.7 V. We measure phase shifts up to 13.3 π at 17 V. Our devices can be operated in the MHz range and allow for the generation of sub-µs pulses." @default.
- W3111675225 created "2020-12-21" @default.
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- W3111675225 date "2021-02-05" @default.
- W3111675225 modified "2023-10-14" @default.
- W3111675225 title "Optoelectromechanical phase shifter with low insertion loss and a 13π tuning range" @default.
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- W3111675225 doi "https://doi.org/10.1364/oe.413202" @default.
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