Matches in SemOpenAlex for { <https://semopenalex.org/work/W3112344642> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W3112344642 endingPage "1784" @default.
- W3112344642 startingPage "1771" @default.
- W3112344642 abstract "In this work, diamond-like carbon (DLC) thin film coatings are deposited on silicon substrates by using plasma-enhanced chemical vapour deposition (PECVD) technique. By varying the hydrogen (H<sub>2</sub>) flow rate, CH<sub>4</sub>−Argon (Ar) flow rate and deposition temperature (T<sub>d</sub>) as per a Box-Behnken experimental design (BBD), 15 DLC deposition experiments are carried out. The Young’s modulus (E) and the coefficient of friction (COF) for the DLCs are measured. By using a second-order polynomial regression approach, two metamodels are built for E and COF, that establish them as functions of H<sub>2</sub> flow rate, CH<sub>4</sub>-Ar flow rate and T<sub>d</sub>. A non-dominated sorting genetic algorithm (NSGA-III) is used to obtain a set of Pareto solutions for the multi-objective optimization of E maximization and COF minimization. According to various practical scenarios, evaluation based on distance from average solution (EDAS) approach is used to identify the most feasible solutions out of the Pareto solution set. Confirmation experiments are conducted which shows the efficacy of the polynomial regression—NSGA-III—EDAS hybrid approach. The surface morphology of the DLCs deposited as per the optimal predictions is also studied by using atomic force microscopy." @default.
- W3112344642 created "2020-12-21" @default.
- W3112344642 creator A5045809386 @default.
- W3112344642 creator A5067300366 @default.
- W3112344642 creator A5069398574 @default.
- W3112344642 creator A5073167751 @default.
- W3112344642 creator A5078237013 @default.
- W3112344642 date "2021-01-01" @default.
- W3112344642 modified "2023-10-18" @default.
- W3112344642 title "Hybrid Metamodel—NSGA-III—EDAS based Optimal Design of Thin Film Coatings" @default.
- W3112344642 cites W1988133629 @default.
- W3112344642 cites W1995649256 @default.
- W3112344642 cites W1998108702 @default.
- W3112344642 cites W2006530554 @default.
- W3112344642 cites W2008308380 @default.
- W3112344642 cites W2022485595 @default.
- W3112344642 cites W2024887280 @default.
- W3112344642 cites W2037243004 @default.
- W3112344642 cites W2086933933 @default.
- W3112344642 cites W2771414575 @default.
- W3112344642 cites W2891335635 @default.
- W3112344642 cites W2905555510 @default.
- W3112344642 cites W2940319697 @default.
- W3112344642 cites W2963603198 @default.
- W3112344642 cites W2980701807 @default.
- W3112344642 cites W3026041366 @default.
- W3112344642 cites W3044324852 @default.
- W3112344642 doi "https://doi.org/10.32604/cmc.2020.013946" @default.
- W3112344642 hasPublicationYear "2021" @default.
- W3112344642 type Work @default.
- W3112344642 sameAs 3112344642 @default.
- W3112344642 citedByCount "5" @default.
- W3112344642 countsByYear W31123446422021 @default.
- W3112344642 countsByYear W31123446422022 @default.
- W3112344642 countsByYear W31123446422023 @default.
- W3112344642 crossrefType "journal-article" @default.
- W3112344642 hasAuthorship W3112344642A5045809386 @default.
- W3112344642 hasAuthorship W3112344642A5067300366 @default.
- W3112344642 hasAuthorship W3112344642A5069398574 @default.
- W3112344642 hasAuthorship W3112344642A5073167751 @default.
- W3112344642 hasAuthorship W3112344642A5078237013 @default.
- W3112344642 hasBestOaLocation W31123446421 @default.
- W3112344642 hasConcept C111696304 @default.
- W3112344642 hasConcept C11413529 @default.
- W3112344642 hasConcept C119857082 @default.
- W3112344642 hasConcept C121332964 @default.
- W3112344642 hasConcept C126255220 @default.
- W3112344642 hasConcept C134306372 @default.
- W3112344642 hasConcept C150077022 @default.
- W3112344642 hasConcept C151730666 @default.
- W3112344642 hasConcept C170295934 @default.
- W3112344642 hasConcept C172120300 @default.
- W3112344642 hasConcept C192562407 @default.
- W3112344642 hasConcept C2816523 @default.
- W3112344642 hasConcept C33923547 @default.
- W3112344642 hasConcept C41008148 @default.
- W3112344642 hasConcept C64297162 @default.
- W3112344642 hasConcept C86803240 @default.
- W3112344642 hasConcept C90119067 @default.
- W3112344642 hasConcept C97355855 @default.
- W3112344642 hasConceptScore W3112344642C111696304 @default.
- W3112344642 hasConceptScore W3112344642C11413529 @default.
- W3112344642 hasConceptScore W3112344642C119857082 @default.
- W3112344642 hasConceptScore W3112344642C121332964 @default.
- W3112344642 hasConceptScore W3112344642C126255220 @default.
- W3112344642 hasConceptScore W3112344642C134306372 @default.
- W3112344642 hasConceptScore W3112344642C150077022 @default.
- W3112344642 hasConceptScore W3112344642C151730666 @default.
- W3112344642 hasConceptScore W3112344642C170295934 @default.
- W3112344642 hasConceptScore W3112344642C172120300 @default.
- W3112344642 hasConceptScore W3112344642C192562407 @default.
- W3112344642 hasConceptScore W3112344642C2816523 @default.
- W3112344642 hasConceptScore W3112344642C33923547 @default.
- W3112344642 hasConceptScore W3112344642C41008148 @default.
- W3112344642 hasConceptScore W3112344642C64297162 @default.
- W3112344642 hasConceptScore W3112344642C86803240 @default.
- W3112344642 hasConceptScore W3112344642C90119067 @default.
- W3112344642 hasConceptScore W3112344642C97355855 @default.
- W3112344642 hasIssue "2" @default.
- W3112344642 hasLocation W31123446421 @default.
- W3112344642 hasOpenAccess W3112344642 @default.
- W3112344642 hasPrimaryLocation W31123446421 @default.
- W3112344642 hasRelatedWork W1990104926 @default.
- W3112344642 hasRelatedWork W1992456076 @default.
- W3112344642 hasRelatedWork W2075257026 @default.
- W3112344642 hasRelatedWork W2075380517 @default.
- W3112344642 hasRelatedWork W2124359793 @default.
- W3112344642 hasRelatedWork W2252677890 @default.
- W3112344642 hasRelatedWork W2322287633 @default.
- W3112344642 hasRelatedWork W2362121187 @default.
- W3112344642 hasRelatedWork W2901823287 @default.
- W3112344642 hasRelatedWork W3184560464 @default.
- W3112344642 hasVolume "66" @default.
- W3112344642 isParatext "false" @default.
- W3112344642 isRetracted "false" @default.
- W3112344642 magId "3112344642" @default.
- W3112344642 workType "article" @default.