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- W3114239716 abstract "In this paper, the influence of a novel complex agent (NH 4 ) 2 SO 3 and inhibitor 2,2’ -[[(methyl-1H-benzotriazol-1-yl) methyl]imino]diethanol (TT) based on hydrogen peroxide (H 2 O 2 ) on Cu/Ru/TEOS was studied. Since our research group has studied the relationship between Cu and Ru before, we now make further supplement. The results showed that both Ru and TEOS increased with the increase of ammonium ion/NH 4 +) concentration, and the mechanism was studied by means of electrochemistry, possibly because of the electrostatic attraction between the NH 4 + ions and Ru, and the addition of ammonium ions may reduce the thickness of the double electric layer on the surface of TEOS. So the Ru and TEOS removal rate goes up." @default.
- W3114239716 created "2021-01-05" @default.
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- W3114239716 date "2020-06-26" @default.
- W3114239716 modified "2023-09-23" @default.
- W3114239716 title "Role of slurry Additions on Chemical Mechanical Polishing of Cu/Ru/TEOS in H2O2-based Slurry" @default.
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- W3114239716 doi "https://doi.org/10.1109/cstic49141.2020.9282596" @default.
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