Matches in SemOpenAlex for { <https://semopenalex.org/work/W3114302564> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W3114302564 endingPage "168" @default.
- W3114302564 startingPage "165" @default.
- W3114302564 abstract "Rapid thermal process (RTP) is performed to heavily-As doped silicon wafer.It is found that the density of oxygen precipitates increases slowly with the increase of the RTP temperature,the cooling rate, and the RTP time." @default.
- W3114302564 created "2021-01-05" @default.
- W3114302564 creator A5010929537 @default.
- W3114302564 creator A5024966093 @default.
- W3114302564 creator A5030374504 @default.
- W3114302564 creator A5047131675 @default.
- W3114302564 creator A5064209091 @default.
- W3114302564 creator A5083398971 @default.
- W3114302564 creator A5084693690 @default.
- W3114302564 date "2006-01-01" @default.
- W3114302564 modified "2023-09-26" @default.
- W3114302564 title "Effect of Rapid Thermal Process on Oxygen Precipitatesin Heavily As-Doped Wafer" @default.
- W3114302564 hasPublicationYear "2006" @default.
- W3114302564 type Work @default.
- W3114302564 sameAs 3114302564 @default.
- W3114302564 citedByCount "0" @default.
- W3114302564 crossrefType "journal-article" @default.
- W3114302564 hasAuthorship W3114302564A5010929537 @default.
- W3114302564 hasAuthorship W3114302564A5024966093 @default.
- W3114302564 hasAuthorship W3114302564A5030374504 @default.
- W3114302564 hasAuthorship W3114302564A5047131675 @default.
- W3114302564 hasAuthorship W3114302564A5064209091 @default.
- W3114302564 hasAuthorship W3114302564A5083398971 @default.
- W3114302564 hasAuthorship W3114302564A5084693690 @default.
- W3114302564 hasConcept C111919701 @default.
- W3114302564 hasConcept C121332964 @default.
- W3114302564 hasConcept C127413603 @default.
- W3114302564 hasConcept C160671074 @default.
- W3114302564 hasConcept C178790620 @default.
- W3114302564 hasConcept C185592680 @default.
- W3114302564 hasConcept C192562407 @default.
- W3114302564 hasConcept C204530211 @default.
- W3114302564 hasConcept C41008148 @default.
- W3114302564 hasConcept C42360764 @default.
- W3114302564 hasConcept C49040817 @default.
- W3114302564 hasConcept C540031477 @default.
- W3114302564 hasConcept C544956773 @default.
- W3114302564 hasConcept C57863236 @default.
- W3114302564 hasConcept C72832162 @default.
- W3114302564 hasConcept C97355855 @default.
- W3114302564 hasConcept C98045186 @default.
- W3114302564 hasConceptScore W3114302564C111919701 @default.
- W3114302564 hasConceptScore W3114302564C121332964 @default.
- W3114302564 hasConceptScore W3114302564C127413603 @default.
- W3114302564 hasConceptScore W3114302564C160671074 @default.
- W3114302564 hasConceptScore W3114302564C178790620 @default.
- W3114302564 hasConceptScore W3114302564C185592680 @default.
- W3114302564 hasConceptScore W3114302564C192562407 @default.
- W3114302564 hasConceptScore W3114302564C204530211 @default.
- W3114302564 hasConceptScore W3114302564C41008148 @default.
- W3114302564 hasConceptScore W3114302564C42360764 @default.
- W3114302564 hasConceptScore W3114302564C49040817 @default.
- W3114302564 hasConceptScore W3114302564C540031477 @default.
- W3114302564 hasConceptScore W3114302564C544956773 @default.
- W3114302564 hasConceptScore W3114302564C57863236 @default.
- W3114302564 hasConceptScore W3114302564C72832162 @default.
- W3114302564 hasConceptScore W3114302564C97355855 @default.
- W3114302564 hasConceptScore W3114302564C98045186 @default.
- W3114302564 hasLocation W31143025641 @default.
- W3114302564 hasOpenAccess W3114302564 @default.
- W3114302564 hasPrimaryLocation W31143025641 @default.
- W3114302564 hasRelatedWork W1968482009 @default.
- W3114302564 hasRelatedWork W1976707706 @default.
- W3114302564 hasRelatedWork W1986204195 @default.
- W3114302564 hasRelatedWork W2011034876 @default.
- W3114302564 hasRelatedWork W2017282529 @default.
- W3114302564 hasRelatedWork W2030625863 @default.
- W3114302564 hasRelatedWork W2038883023 @default.
- W3114302564 hasRelatedWork W2049357171 @default.
- W3114302564 hasRelatedWork W2071749976 @default.
- W3114302564 hasRelatedWork W2080925916 @default.
- W3114302564 hasRelatedWork W2092948020 @default.
- W3114302564 hasRelatedWork W2155857179 @default.
- W3114302564 hasRelatedWork W2249174003 @default.
- W3114302564 hasRelatedWork W2390074492 @default.
- W3114302564 hasRelatedWork W2416923279 @default.
- W3114302564 hasRelatedWork W2605922741 @default.
- W3114302564 hasRelatedWork W2788382468 @default.
- W3114302564 hasRelatedWork W2966848972 @default.
- W3114302564 hasRelatedWork W2992142578 @default.
- W3114302564 hasRelatedWork W874363783 @default.
- W3114302564 hasVolume "27" @default.
- W3114302564 isParatext "false" @default.
- W3114302564 isRetracted "false" @default.
- W3114302564 magId "3114302564" @default.
- W3114302564 workType "article" @default.