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- W3114385689 endingPage "22" @default.
- W3114385689 startingPage "22" @default.
- W3114385689 abstract "This review paper is devoted to optics of inhomogeneous thin films exhibiting defects consisting in transition layers, overlayers, thickness nonuniformity, boundary roughness and uniaxial anisotropy. The theoretical approaches enabling the inclusion of these defects into formulae expressing the optical quantities of these inhomogeneous thin films are summarized. These approaches are based on the recursive and matrix formalisms for the transition layers and overlayers, averaging of the elements of the Mueller matrix using local thickness distribution or polynomial formulation for the thickness nonuniformity, scalar diffraction theory and Rayleigh-Rice theory or their combination for boundary roughness and Yeh matrix formalism for uniaxial anisotropy. The theoretical results are illustrated using selected examples of the optical characterization of the inhomogeneous polymer-like thin films exhibiting the combination of the transition layers and thickness nonuniformity and inhomogeneous thin films of nonstoichiometric silicon nitride with the combination of boundary roughness and uniaxial anisotropy. This characterization is realized by variable angle spectroscopic ellipsometry and spectroscopic reflectometry. It is shown that using these optical techniques, the complete optical characterization of the mentioned thin films can be performed. Thus, it is presented that the values of all the parameters characterizing these films can be determined." @default.
- W3114385689 created "2021-01-05" @default.
- W3114385689 creator A5042489933 @default.
- W3114385689 creator A5059808679 @default.
- W3114385689 creator A5075185020 @default.
- W3114385689 date "2020-12-27" @default.
- W3114385689 modified "2023-09-26" @default.
- W3114385689 title "Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization" @default.
- W3114385689 cites W1552666035 @default.
- W3114385689 cites W1935897541 @default.
- W3114385689 cites W1967709582 @default.
- W3114385689 cites W1969065904 @default.
- W3114385689 cites W1971868582 @default.
- W3114385689 cites W1972100726 @default.
- W3114385689 cites W1976394299 @default.
- W3114385689 cites W1978061881 @default.
- W3114385689 cites W1983885153 @default.
- W3114385689 cites W1984328512 @default.
- W3114385689 cites W1985605322 @default.
- W3114385689 cites W1985796806 @default.
- W3114385689 cites W1986974241 @default.
- W3114385689 cites W1989874255 @default.
- W3114385689 cites W1990581331 @default.
- W3114385689 cites W1992345966 @default.
- W3114385689 cites W1996197108 @default.
- W3114385689 cites W2004486370 @default.
- W3114385689 cites W2006309075 @default.
- W3114385689 cites W2007955901 @default.
- W3114385689 cites W2009560386 @default.
- W3114385689 cites W2014946810 @default.
- W3114385689 cites W2016895010 @default.
- W3114385689 cites W2017191529 @default.
- W3114385689 cites W2018430435 @default.
- W3114385689 cites W2020356837 @default.
- W3114385689 cites W2020866737 @default.
- W3114385689 cites W2021703318 @default.
- W3114385689 cites W2022623894 @default.
- W3114385689 cites W2022819923 @default.
- W3114385689 cites W2026832211 @default.
- W3114385689 cites W2027396456 @default.
- W3114385689 cites W2028148029 @default.
- W3114385689 cites W2028567293 @default.
- W3114385689 cites W2030490909 @default.
- W3114385689 cites W2034350252 @default.
- W3114385689 cites W2034925403 @default.
- W3114385689 cites W2035714091 @default.
- W3114385689 cites W2038551630 @default.
- W3114385689 cites W2044301613 @default.
- W3114385689 cites W2049910096 @default.
- W3114385689 cites W2051082098 @default.
- W3114385689 cites W2054565622 @default.
- W3114385689 cites W2055781502 @default.
- W3114385689 cites W2056024376 @default.
- W3114385689 cites W2058184279 @default.
- W3114385689 cites W2060296944 @default.
- W3114385689 cites W2063090612 @default.
- W3114385689 cites W2064157814 @default.
- W3114385689 cites W2064365642 @default.
- W3114385689 cites W2066328144 @default.
- W3114385689 cites W2066561462 @default.
- W3114385689 cites W2066886929 @default.
- W3114385689 cites W2071604718 @default.
- W3114385689 cites W2074986031 @default.
- W3114385689 cites W2077262424 @default.
- W3114385689 cites W2077436057 @default.
- W3114385689 cites W2084197907 @default.
- W3114385689 cites W2086723952 @default.
- W3114385689 cites W2088318654 @default.
- W3114385689 cites W2091947079 @default.
- W3114385689 cites W2093621582 @default.
- W3114385689 cites W2098047758 @default.
- W3114385689 cites W2113343790 @default.
- W3114385689 cites W2115274069 @default.
- W3114385689 cites W2121695753 @default.
- W3114385689 cites W2130345101 @default.
- W3114385689 cites W2146186375 @default.
- W3114385689 cites W2153979035 @default.
- W3114385689 cites W2160817978 @default.
- W3114385689 cites W2212183047 @default.
- W3114385689 cites W2246996282 @default.
- W3114385689 cites W2503290190 @default.
- W3114385689 cites W2547034866 @default.
- W3114385689 cites W2588051483 @default.
- W3114385689 cites W2607979797 @default.
- W3114385689 cites W2806687570 @default.
- W3114385689 cites W2907974255 @default.
- W3114385689 cites W2914079280 @default.
- W3114385689 cites W2921184594 @default.
- W3114385689 cites W2955201738 @default.
- W3114385689 cites W2964133307 @default.
- W3114385689 cites W2988647736 @default.
- W3114385689 cites W2995702718 @default.
- W3114385689 cites W2998048867 @default.
- W3114385689 cites W3049862272 @default.
- W3114385689 cites W4241707511 @default.
- W3114385689 cites W48819485 @default.
- W3114385689 cites W2808571450 @default.
- W3114385689 doi "https://doi.org/10.3390/coatings11010022" @default.