FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3115008259> ?p ?o ?g. }

• W3115008259 endingPage "52" @default.
• W3115008259 startingPage "42" @default.
• W3115008259 abstract "A two-dimensional (2D) model was developed, for the first time, to describe the characteristics of the micromachined thermal expansion-based angular motion (TEAM) sensor, which has been validated by the experimental results. Scaling analysis on the performance characteristics through the 2D model was conducted to optimize the TEAM sensor's design in terms of the normalized distances between the microheaters and temperature detectors in x and y directions, the thickness of the thin film, the heater width, the cavity depth, and the heater temperature. Furthermore, the proposed 2D model was normalized by two dimensionless numbers, namely Rayleigh number Ra and Peclet number Pe, with a critical Rayleigh number (Ra <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>c</sub> * = 18,000) identified to differentiate linear and nonlinear operation regimes of the TEAM sensor. In particular, our 2D model is much faster than the conventional CFD model by three orders of magnitude (18.91s versus 5.5h), enabling rapid system-level optimization of the critical design parameters. Accordingly, the TEAM sensors with three pairs of platinum thermoresistive temperature sensors were designed and fabricated. The fabricated device demonstrated a normalized sensitivity of 11.8 μV/°s/mW based on the working fluid of air, which was more than three times better than previous thermal angular motion sensors. Thus, with the experimental validation, the proposed 2D model should be a reliable tool to realize the systematical design optimization of TEAM sensors integrated with on-chip microelectronics for future industrial IoT applications." @default.
• W3115008259 created "2021-01-05" @default.
• W3115008259 creator A5014078865 @default.
• W3115008259 creator A5018122425 @default.
• W3115008259 creator A5034276066 @default.
• W3115008259 creator A5063522793 @default.
• W3115008259 creator A5085733669 @default.
• W3115008259 date "2021-02-01" @default.
• W3115008259 modified "2023-10-01" @default.
• W3115008259 title "Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion Sensor" @default.
• W3115008259 cites W1253510265 @default.
• W3115008259 cites W1947729258 @default.
• W3115008259 cites W1965682519 @default.
• W3115008259 cites W1966275328 @default.
• W3115008259 cites W1994028266 @default.
• W3115008259 cites W1995551594 @default.
• W3115008259 cites W2015234393 @default.
• W3115008259 cites W2015387574 @default.
• W3115008259 cites W2021516715 @default.
• W3115008259 cites W2025294205 @default.
• W3115008259 cites W2051454104 @default.
• W3115008259 cites W2057226212 @default.
• W3115008259 cites W2061339763 @default.
• W3115008259 cites W2063137106 @default.
• W3115008259 cites W2066274492 @default.
• W3115008259 cites W2092311014 @default.
• W3115008259 cites W2124601320 @default.
• W3115008259 cites W2149128480 @default.
• W3115008259 cites W2168828246 @default.
• W3115008259 cites W2235733324 @default.
• W3115008259 cites W2271400025 @default.
• W3115008259 cites W2514858717 @default.
• W3115008259 cites W2761234876 @default.
• W3115008259 cites W2908637303 @default.
• W3115008259 cites W2965686692 @default.
• W3115008259 cites W2982482154 @default.
• W3115008259 cites W2999518877 @default.
• W3115008259 cites W3015381580 @default.
• W3115008259 cites W3015405771 @default.
• W3115008259 cites W2131510015 @default.
• W3115008259 doi "https://doi.org/10.1109/jmems.2020.3045494" @default.
• W3115008259 hasPublicationYear "2021" @default.
• W3115008259 type Work @default.
• W3115008259 sameAs 3115008259 @default.
• W3115008259 citedByCount "2" @default.
• W3115008259 countsByYear W31150082592021 @default.
• W3115008259 countsByYear W31150082592023 @default.
• W3115008259 crossrefType "journal-article" @default.
• W3115008259 hasAuthorship W3115008259A5014078865 @default.
• W3115008259 hasAuthorship W3115008259A5018122425 @default.
• W3115008259 hasAuthorship W3115008259A5034276066 @default.
• W3115008259 hasAuthorship W3115008259A5063522793 @default.
• W3115008259 hasAuthorship W3115008259A5085733669 @default.
• W3115008259 hasConcept C119599485 @default.
• W3115008259 hasConcept C121332964 @default.
• W3115008259 hasConcept C127413603 @default.
• W3115008259 hasConcept C136525101 @default.
• W3115008259 hasConcept C142724271 @default.
• W3115008259 hasConcept C145667562 @default.
• W3115008259 hasConcept C165005293 @default.
• W3115008259 hasConcept C187937830 @default.
• W3115008259 hasConcept C192562407 @default.
• W3115008259 hasConcept C204787440 @default.
• W3115008259 hasConcept C205684552 @default.
• W3115008259 hasConcept C21200559 @default.
• W3115008259 hasConcept C24326235 @default.
• W3115008259 hasConcept C24872484 @default.
• W3115008259 hasConcept C41008148 @default.
• W3115008259 hasConcept C49040817 @default.
• W3115008259 hasConcept C57879066 @default.
• W3115008259 hasConcept C71924100 @default.
• W3115008259 hasConcept C78519656 @default.
• W3115008259 hasConceptScore W3115008259C119599485 @default.
• W3115008259 hasConceptScore W3115008259C121332964 @default.
• W3115008259 hasConceptScore W3115008259C127413603 @default.
• W3115008259 hasConceptScore W3115008259C136525101 @default.
• W3115008259 hasConceptScore W3115008259C142724271 @default.
• W3115008259 hasConceptScore W3115008259C145667562 @default.
• W3115008259 hasConceptScore W3115008259C165005293 @default.
• W3115008259 hasConceptScore W3115008259C187937830 @default.
• W3115008259 hasConceptScore W3115008259C192562407 @default.
• W3115008259 hasConceptScore W3115008259C204787440 @default.
• W3115008259 hasConceptScore W3115008259C205684552 @default.
• W3115008259 hasConceptScore W3115008259C21200559 @default.
• W3115008259 hasConceptScore W3115008259C24326235 @default.
• W3115008259 hasConceptScore W3115008259C24872484 @default.
• W3115008259 hasConceptScore W3115008259C41008148 @default.
• W3115008259 hasConceptScore W3115008259C49040817 @default.
• W3115008259 hasConceptScore W3115008259C57879066 @default.
• W3115008259 hasConceptScore W3115008259C71924100 @default.
• W3115008259 hasConceptScore W3115008259C78519656 @default.
• W3115008259 hasFunder F4320321592 @default.
• W3115008259 hasIssue "1" @default.
• W3115008259 hasLocation W31150082591 @default.
• W3115008259 hasOpenAccess W3115008259 @default.
• W3115008259 hasPrimaryLocation W31150082591 @default.
• W3115008259 hasRelatedWork W1985127278 @default.
• W3115008259 hasRelatedWork W2009066298 @default.

• next