Matches in SemOpenAlex for { <https://semopenalex.org/work/W3115667002> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W3115667002 endingPage "262106" @default.
- W3115667002 startingPage "262106" @default.
- W3115667002 abstract "We demonstrate a low threading dislocation density (TDD) and smooth surface InAs layer epitaxially grown on Si by suppressing phase separation of InxAl1−xAs (x = 0 to 1) graded buffer and by inserting a tensile-strained In0.95Al0.05As dislocation filter layer. While keeping the total III–V layer below 2.7 μm to avoid thermal cracks, we have achieved a sixfold reduction of TDD in InAs on Si compared to the unoptimized structure. We found a strong correlation between the metamorphic InAs surface roughness and TDD as a function of InxAl1−xAs buffer thickness. An optimal thickness of 175 nm was obtained where both phase separation and 3D islanding growth were suppressed. Moreover, a tensile-strained In0.95Al0.05As dislocation filter layer and high growth temperature of the InAs cap layer further assisted the dislocation reduction process, which led to a TDD to 1.37 × 108 cm−2. Finally, an InAs p-i-n photodetector grown on the optimized InAs/Si template confirmed its high quality by showing an improved responsivity from 0.16 to 0.32 A/W at a 2 μm wavelength." @default.
- W3115667002 created "2021-01-05" @default.
- W3115667002 creator A5004063857 @default.
- W3115667002 creator A5019758327 @default.
- W3115667002 creator A5040148310 @default.
- W3115667002 creator A5074623523 @default.
- W3115667002 creator A5074835387 @default.
- W3115667002 creator A5078854391 @default.
- W3115667002 creator A5080338996 @default.
- W3115667002 creator A5087282451 @default.
- W3115667002 date "2020-12-28" @default.
- W3115667002 modified "2023-10-17" @default.
- W3115667002 title "Optimized InAlAs graded buffer and tensile-strained dislocation filter layer for high quality InAs photodetector grown on Si" @default.
- W3115667002 cites W1495147889 @default.
- W3115667002 cites W1675587314 @default.
- W3115667002 cites W1970710487 @default.
- W3115667002 cites W1998266962 @default.
- W3115667002 cites W2007703983 @default.
- W3115667002 cites W2008611216 @default.
- W3115667002 cites W2015000449 @default.
- W3115667002 cites W2016785852 @default.
- W3115667002 cites W2036990043 @default.
- W3115667002 cites W2065250885 @default.
- W3115667002 cites W2074988281 @default.
- W3115667002 cites W2159641377 @default.
- W3115667002 cites W2160157710 @default.
- W3115667002 cites W2296414682 @default.
- W3115667002 cites W2406352950 @default.
- W3115667002 cites W2749487673 @default.
- W3115667002 cites W2771544890 @default.
- W3115667002 cites W2798043424 @default.
- W3115667002 cites W2803581649 @default.
- W3115667002 cites W2886258513 @default.
- W3115667002 cites W2886813692 @default.
- W3115667002 cites W2902866074 @default.
- W3115667002 cites W2942616480 @default.
- W3115667002 cites W2944449488 @default.
- W3115667002 cites W3017149243 @default.
- W3115667002 cites W3106066531 @default.
- W3115667002 cites W2971497231 @default.
- W3115667002 doi "https://doi.org/10.1063/5.0032027" @default.
- W3115667002 hasPublicationYear "2020" @default.
- W3115667002 type Work @default.
- W3115667002 sameAs 3115667002 @default.
- W3115667002 citedByCount "6" @default.
- W3115667002 countsByYear W31156670022021 @default.
- W3115667002 countsByYear W31156670022022 @default.
- W3115667002 countsByYear W31156670022023 @default.
- W3115667002 crossrefType "journal-article" @default.
- W3115667002 hasAuthorship W3115667002A5004063857 @default.
- W3115667002 hasAuthorship W3115667002A5019758327 @default.
- W3115667002 hasAuthorship W3115667002A5040148310 @default.
- W3115667002 hasAuthorship W3115667002A5074623523 @default.
- W3115667002 hasAuthorship W3115667002A5074835387 @default.
- W3115667002 hasAuthorship W3115667002A5078854391 @default.
- W3115667002 hasAuthorship W3115667002A5080338996 @default.
- W3115667002 hasAuthorship W3115667002A5087282451 @default.
- W3115667002 hasConcept C107365816 @default.
- W3115667002 hasConcept C110738630 @default.
- W3115667002 hasConcept C112950240 @default.
- W3115667002 hasConcept C159122135 @default.
- W3115667002 hasConcept C159985019 @default.
- W3115667002 hasConcept C178889773 @default.
- W3115667002 hasConcept C192562407 @default.
- W3115667002 hasConcept C23125352 @default.
- W3115667002 hasConcept C2779227376 @default.
- W3115667002 hasConcept C49040817 @default.
- W3115667002 hasConceptScore W3115667002C107365816 @default.
- W3115667002 hasConceptScore W3115667002C110738630 @default.
- W3115667002 hasConceptScore W3115667002C112950240 @default.
- W3115667002 hasConceptScore W3115667002C159122135 @default.
- W3115667002 hasConceptScore W3115667002C159985019 @default.
- W3115667002 hasConceptScore W3115667002C178889773 @default.
- W3115667002 hasConceptScore W3115667002C192562407 @default.
- W3115667002 hasConceptScore W3115667002C23125352 @default.
- W3115667002 hasConceptScore W3115667002C2779227376 @default.
- W3115667002 hasConceptScore W3115667002C49040817 @default.
- W3115667002 hasFunder F4320322120 @default.
- W3115667002 hasIssue "26" @default.
- W3115667002 hasLocation W31156670021 @default.
- W3115667002 hasOpenAccess W3115667002 @default.
- W3115667002 hasPrimaryLocation W31156670021 @default.
- W3115667002 hasRelatedWork W1994956462 @default.
- W3115667002 hasRelatedWork W2071784437 @default.
- W3115667002 hasRelatedWork W2094667727 @default.
- W3115667002 hasRelatedWork W2425021306 @default.
- W3115667002 hasRelatedWork W2594066644 @default.
- W3115667002 hasRelatedWork W2607235087 @default.
- W3115667002 hasRelatedWork W3016473159 @default.
- W3115667002 hasRelatedWork W3080463885 @default.
- W3115667002 hasRelatedWork W4200618466 @default.
- W3115667002 hasRelatedWork W4293801421 @default.
- W3115667002 hasVolume "117" @default.
- W3115667002 isParatext "false" @default.
- W3115667002 isRetracted "false" @default.
- W3115667002 magId "3115667002" @default.
- W3115667002 workType "article" @default.