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- W3115702570 abstract "Emerging devices (Logic and Advanced Memory) require high quality thin (5-20 Å) electrode and barrier films. Difficult thermal budget constraints are now being placed on well-known materials such as TiN and TaN. Deposition temperature limitations have reached 350°C and below while very low resistivity (<100 micro-ohm/cm) must be achieved. Novel Ti precursors are being explored.1 Our approach has focused on hydrazine (N2H4) as an alternative nitrogen source to NH3." @default.
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- W3115702570 date "2020-11-23" @default.
- W3115702570 modified "2023-10-18" @default.
- W3115702570 title "Comparative Study of Titanium Nitride ALD using High Purity Hydrazine vs Ammonia" @default.
- W3115702570 doi "https://doi.org/10.1149/ma2020-02231668mtgabs" @default.
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