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• W3115746103 abstract "Bolometers are thermal detectors widely applied in the mid-infrared (MIR) wavelength range. In an integrated sensing system on chip, a broadband scalable bolometer absorbing the light over the whole MIR wavelength range could play an important role. In this work, we have developed a waveguide-based bolometer operating in the wavelength range of 3.72–3.88 µm on the amorphous silicon (a-Si) platform. Significant improvements in the bolometer design result in a <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mn>20</mml:mn> <mml:mo>×<!-- × --></mml:mo> </mml:math> improved responsivity compared to earlier work on silicon-on-insulator (SOI). The bolometer offers 24.62% change in resistance per milliwatt of input power at 3.8 µm wavelength. The thermal conductance of the bolometer is <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mn>3.86</mml:mn> <mml:mo>×<!-- × --></mml:mo> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>1</mml:mn> </mml:mrow> </mml:mrow> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msup> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mn>0</mml:mn> </mml:mrow> </mml:mrow> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mo>−<!-- − --></mml:mo> <mml:mn>5</mml:mn> </mml:mrow> </mml:msup> </mml:mrow> <mml:mspace width=thickmathspace /> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>W</mml:mi> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mo>/</mml:mo> </mml:mrow> <mml:mi mathvariant=normal>K</mml:mi> </mml:mrow> </mml:mrow> </mml:math> , and an improvement as large as 3 orders magnitude may be possible in the future through redesign of the device geometry." @default.
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• W3115746103 date "2021-02-01" @default.
• W3115746103 modified "2023-10-17" @default.
• W3115746103 title "Nanometallic antenna-assisted amorphous silicon waveguide integrated bolometer for mid-infrared" @default.
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• W3115746103 doi "https://doi.org/10.1364/ol.412529" @default.
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