Matches in SemOpenAlex for { <https://semopenalex.org/work/W3116346739> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W3116346739 abstract "Abstract Three case studies in which the passive voltage contrast technique (PVC) was used in-fab during the development of a 0.25μm ASIC CMOS technology for rapid characterization and failure isolation are presented. The first case involved using the PVC technique to evaluate the gate oxide quality at different points of the process, allowing for quick identification of the process steps that were damaging the gate oxide and the relative magnitude of the damage that each process step contributed. PVC was then used to perform in-line evaluation of the split lots that were ran to address the problem without having to pull wafers off the line for electrical testing. In the second case study, PVC was used in-line to identify the source of siliciderelated gate-to-source/drain leakage. At this point of the process, electrical probing was not possible, and PVC circumvented this problem. The third case involved using PVC to help identify a new failure mechanism for tungsten plug vias that manifested itself due to plasma charging and layout peculiarities related to deep submicron design rules." @default.
- W3116346739 created "2021-01-05" @default.
- W3116346739 creator A5005406152 @default.
- W3116346739 creator A5036303976 @default.
- W3116346739 creator A5061960769 @default.
- W3116346739 date "1998-11-01" @default.
- W3116346739 modified "2023-09-24" @default.
- W3116346739 title "Passive Voltage Contrast Technique for Rapid In-Line Characterization and Failure Isolation During Development of Deep-Submicron ASIC CMOS Technology" @default.
- W3116346739 doi "https://doi.org/10.31399/asm.cp.istfa1998p0221" @default.
- W3116346739 hasPublicationYear "1998" @default.
- W3116346739 type Work @default.
- W3116346739 sameAs 3116346739 @default.
- W3116346739 citedByCount "7" @default.
- W3116346739 countsByYear W31163467392013 @default.
- W3116346739 countsByYear W31163467392015 @default.
- W3116346739 countsByYear W31163467392017 @default.
- W3116346739 countsByYear W31163467392018 @default.
- W3116346739 countsByYear W31163467392022 @default.
- W3116346739 crossrefType "proceedings-article" @default.
- W3116346739 hasAuthorship W3116346739A5005406152 @default.
- W3116346739 hasAuthorship W3116346739A5036303976 @default.
- W3116346739 hasAuthorship W3116346739A5061960769 @default.
- W3116346739 hasConcept C119599485 @default.
- W3116346739 hasConcept C127413603 @default.
- W3116346739 hasConcept C139719470 @default.
- W3116346739 hasConcept C160671074 @default.
- W3116346739 hasConcept C162324750 @default.
- W3116346739 hasConcept C165801399 @default.
- W3116346739 hasConcept C172385210 @default.
- W3116346739 hasConcept C192562407 @default.
- W3116346739 hasConcept C2361726 @default.
- W3116346739 hasConcept C24326235 @default.
- W3116346739 hasConcept C2777042071 @default.
- W3116346739 hasConcept C41008148 @default.
- W3116346739 hasConcept C46362747 @default.
- W3116346739 hasConcept C49040817 @default.
- W3116346739 hasConcept C77390884 @default.
- W3116346739 hasConceptScore W3116346739C119599485 @default.
- W3116346739 hasConceptScore W3116346739C127413603 @default.
- W3116346739 hasConceptScore W3116346739C139719470 @default.
- W3116346739 hasConceptScore W3116346739C160671074 @default.
- W3116346739 hasConceptScore W3116346739C162324750 @default.
- W3116346739 hasConceptScore W3116346739C165801399 @default.
- W3116346739 hasConceptScore W3116346739C172385210 @default.
- W3116346739 hasConceptScore W3116346739C192562407 @default.
- W3116346739 hasConceptScore W3116346739C2361726 @default.
- W3116346739 hasConceptScore W3116346739C24326235 @default.
- W3116346739 hasConceptScore W3116346739C2777042071 @default.
- W3116346739 hasConceptScore W3116346739C41008148 @default.
- W3116346739 hasConceptScore W3116346739C46362747 @default.
- W3116346739 hasConceptScore W3116346739C49040817 @default.
- W3116346739 hasConceptScore W3116346739C77390884 @default.
- W3116346739 hasLocation W31163467391 @default.
- W3116346739 hasOpenAccess W3116346739 @default.
- W3116346739 hasPrimaryLocation W31163467391 @default.
- W3116346739 hasRelatedWork W1867051083 @default.
- W3116346739 hasRelatedWork W1903572445 @default.
- W3116346739 hasRelatedWork W2034106250 @default.
- W3116346739 hasRelatedWork W2038208423 @default.
- W3116346739 hasRelatedWork W2046708502 @default.
- W3116346739 hasRelatedWork W2134927186 @default.
- W3116346739 hasRelatedWork W2142531470 @default.
- W3116346739 hasRelatedWork W2150577857 @default.
- W3116346739 hasRelatedWork W2535805929 @default.
- W3116346739 hasRelatedWork W3127857378 @default.
- W3116346739 isParatext "false" @default.
- W3116346739 isRetracted "false" @default.
- W3116346739 magId "3116346739" @default.
- W3116346739 workType "article" @default.