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- W3116797568 abstract "Abstract Improved Scanning Electron Microscope (SEM) vacuum conditions have been of considerable interest during the past decade, especially as low landing energies are employed to perform surface sensitive imaging [1][2][3]. To further improve instrument performance plasma cleaning can be applied. In general, the cleaning chemistry is a plasma formed from laboratory air (nitrogen+oxygen). TEM and SEM samples can be cleaned ex-situ with this plasma. Alternatively, other gas mixtures have been reported such as 75% Argon + 25% Oxygen [4]. In this study, we report on the use of 95% Argon + 5% Hydrogen mixture for the removal of carbon and oxygen containing films on Indium using low Energy Dispersive Spectroscopy (EDS). This gas mixture is not pyrophoric and is well suited for the laboratory environment." @default.
- W3116797568 created "2021-01-05" @default.
- W3116797568 creator A5015691313 @default.
- W3116797568 creator A5020948947 @default.
- W3116797568 creator A5028591172 @default.
- W3116797568 creator A5031151347 @default.
- W3116797568 creator A5040720085 @default.
- W3116797568 creator A5086053319 @default.
- W3116797568 creator A5087765437 @default.
- W3116797568 date "2016-11-01" @default.
- W3116797568 modified "2023-09-27" @default.
- W3116797568 title "The Removal of Thin Oxygen and Carbon Surface Films by H2/Ar Plasmas as Characterized by Low kV EDS" @default.
- W3116797568 doi "https://doi.org/10.31399/asm.cp.istfa2016p0490" @default.
- W3116797568 hasPublicationYear "2016" @default.
- W3116797568 type Work @default.
- W3116797568 sameAs 3116797568 @default.
- W3116797568 citedByCount "0" @default.
- W3116797568 crossrefType "proceedings-article" @default.
- W3116797568 hasAuthorship W3116797568A5015691313 @default.
- W3116797568 hasAuthorship W3116797568A5020948947 @default.
- W3116797568 hasAuthorship W3116797568A5028591172 @default.
- W3116797568 hasAuthorship W3116797568A5031151347 @default.
- W3116797568 hasAuthorship W3116797568A5040720085 @default.
- W3116797568 hasAuthorship W3116797568A5086053319 @default.
- W3116797568 hasAuthorship W3116797568A5087765437 @default.
- W3116797568 hasConcept C104779481 @default.
- W3116797568 hasConcept C121332964 @default.
- W3116797568 hasConcept C127413603 @default.
- W3116797568 hasConcept C140205800 @default.
- W3116797568 hasConcept C159985019 @default.
- W3116797568 hasConcept C178790620 @default.
- W3116797568 hasConcept C185592680 @default.
- W3116797568 hasConcept C192562407 @default.
- W3116797568 hasConcept C42360764 @default.
- W3116797568 hasConcept C512968161 @default.
- W3116797568 hasConcept C540031477 @default.
- W3116797568 hasConcept C62520636 @default.
- W3116797568 hasConcept C82706917 @default.
- W3116797568 hasConceptScore W3116797568C104779481 @default.
- W3116797568 hasConceptScore W3116797568C121332964 @default.
- W3116797568 hasConceptScore W3116797568C127413603 @default.
- W3116797568 hasConceptScore W3116797568C140205800 @default.
- W3116797568 hasConceptScore W3116797568C159985019 @default.
- W3116797568 hasConceptScore W3116797568C178790620 @default.
- W3116797568 hasConceptScore W3116797568C185592680 @default.
- W3116797568 hasConceptScore W3116797568C192562407 @default.
- W3116797568 hasConceptScore W3116797568C42360764 @default.
- W3116797568 hasConceptScore W3116797568C512968161 @default.
- W3116797568 hasConceptScore W3116797568C540031477 @default.
- W3116797568 hasConceptScore W3116797568C62520636 @default.
- W3116797568 hasConceptScore W3116797568C82706917 @default.
- W3116797568 hasLocation W31167975681 @default.
- W3116797568 hasOpenAccess W3116797568 @default.
- W3116797568 hasPrimaryLocation W31167975681 @default.
- W3116797568 hasRelatedWork W1570630462 @default.
- W3116797568 hasRelatedWork W1582194073 @default.
- W3116797568 hasRelatedWork W1592450403 @default.
- W3116797568 hasRelatedWork W1995979755 @default.
- W3116797568 hasRelatedWork W1998393589 @default.
- W3116797568 hasRelatedWork W1999429599 @default.
- W3116797568 hasRelatedWork W2002716316 @default.
- W3116797568 hasRelatedWork W2032964760 @default.
- W3116797568 hasRelatedWork W2068291522 @default.
- W3116797568 hasRelatedWork W2069840958 @default.
- W3116797568 hasRelatedWork W2093184903 @default.
- W3116797568 hasRelatedWork W2116157072 @default.
- W3116797568 hasRelatedWork W2133841606 @default.
- W3116797568 hasRelatedWork W2153694961 @default.
- W3116797568 hasRelatedWork W2185451012 @default.
- W3116797568 hasRelatedWork W2517819420 @default.
- W3116797568 hasRelatedWork W2555771529 @default.
- W3116797568 hasRelatedWork W2883247410 @default.
- W3116797568 hasRelatedWork W3141721432 @default.
- W3116797568 hasRelatedWork W351331487 @default.
- W3116797568 isParatext "false" @default.
- W3116797568 isRetracted "false" @default.
- W3116797568 magId "3116797568" @default.
- W3116797568 workType "article" @default.