Matches in SemOpenAlex for { <https://semopenalex.org/work/W3116900987> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W3116900987 endingPage "12" @default.
- W3116900987 startingPage "6" @default.
- W3116900987 abstract "We modified a synchrotron X-ray diffraction imaging, a kind of X-ray diffraction topography (XRDT), technique to visualize a local latticeplane shape of a whole wafer and to make measurement time shorter. The technique needs monochromatic X-rays with an enough large beam size having a small angular divergence. In addition, it has two limitations related to a local d spacing as well as a local lattice-plane curvature. Our key point is that two equivalent reflections or more for different sample azimuth angles have been used. We obtained center angles of rocking curves from many positions on a sample surface with a two-dimensional detector and evaluated the local deviation angles on two respective diffraction planes. Local reciprocal-lattice vectors for respective sample surface positions were obtained using the deviation angles via the rotation matrix. Our three following studies are introduced: 1)lattice-plane orientation mapping of homoepitaxial GaN (0001) thin films grown on a 2-inch whole wafer, 2)visualization of crystal perfection and lattice-plane shape of 4-inch whole GaN(0001) wafer, and 3)visualization of lattice-plane twisting of an m-planeGaN homoepitaxial layer. The developed XRDT technology allows us to quickly visualize variation of lattice-plane orientations in a whole GaN wafer as well as the anisotropic mosaicity." @default.
- W3116900987 created "2021-01-05" @default.
- W3116900987 creator A5020024959 @default.
- W3116900987 creator A5078729969 @default.
- W3116900987 date "2020-12-16" @default.
- W3116900987 modified "2023-09-27" @default.
- W3116900987 title "Local Lattice Plane Orientation Mapping of Entire GaN Wafer" @default.
- W3116900987 cites W1600796735 @default.
- W3116900987 cites W1972289697 @default.
- W3116900987 cites W1995775726 @default.
- W3116900987 cites W1996129193 @default.
- W3116900987 cites W2002836264 @default.
- W3116900987 cites W2013816619 @default.
- W3116900987 cites W2021068925 @default.
- W3116900987 cites W2045312390 @default.
- W3116900987 cites W2054600685 @default.
- W3116900987 cites W2063492344 @default.
- W3116900987 cites W2083588888 @default.
- W3116900987 cites W2091657532 @default.
- W3116900987 cites W2410389722 @default.
- W3116900987 cites W2625370502 @default.
- W3116900987 cites W2802310186 @default.
- W3116900987 cites W2866633223 @default.
- W3116900987 cites W2883147809 @default.
- W3116900987 cites W2884001221 @default.
- W3116900987 cites W2901463720 @default.
- W3116900987 cites W2918354720 @default.
- W3116900987 cites W2922295255 @default.
- W3116900987 cites W2965357010 @default.
- W3116900987 cites W2999197835 @default.
- W3116900987 doi "https://doi.org/10.1063/9780735422698_006" @default.
- W3116900987 hasPublicationYear "2020" @default.
- W3116900987 type Work @default.
- W3116900987 sameAs 3116900987 @default.
- W3116900987 citedByCount "0" @default.
- W3116900987 crossrefType "book-chapter" @default.
- W3116900987 hasAuthorship W3116900987A5020024959 @default.
- W3116900987 hasAuthorship W3116900987A5078729969 @default.
- W3116900987 hasConcept C120665830 @default.
- W3116900987 hasConcept C121332964 @default.
- W3116900987 hasConcept C122391093 @default.
- W3116900987 hasConcept C132612359 @default.
- W3116900987 hasConcept C160671074 @default.
- W3116900987 hasConcept C192562407 @default.
- W3116900987 hasConcept C207114421 @default.
- W3116900987 hasConcept C24890656 @default.
- W3116900987 hasConcept C2524010 @default.
- W3116900987 hasConcept C2780779063 @default.
- W3116900987 hasConcept C2781204021 @default.
- W3116900987 hasConcept C33923547 @default.
- W3116900987 hasConcept C40833965 @default.
- W3116900987 hasConcept C49040817 @default.
- W3116900987 hasConcept C50515024 @default.
- W3116900987 hasConcept C89957378 @default.
- W3116900987 hasConceptScore W3116900987C120665830 @default.
- W3116900987 hasConceptScore W3116900987C121332964 @default.
- W3116900987 hasConceptScore W3116900987C122391093 @default.
- W3116900987 hasConceptScore W3116900987C132612359 @default.
- W3116900987 hasConceptScore W3116900987C160671074 @default.
- W3116900987 hasConceptScore W3116900987C192562407 @default.
- W3116900987 hasConceptScore W3116900987C207114421 @default.
- W3116900987 hasConceptScore W3116900987C24890656 @default.
- W3116900987 hasConceptScore W3116900987C2524010 @default.
- W3116900987 hasConceptScore W3116900987C2780779063 @default.
- W3116900987 hasConceptScore W3116900987C2781204021 @default.
- W3116900987 hasConceptScore W3116900987C33923547 @default.
- W3116900987 hasConceptScore W3116900987C40833965 @default.
- W3116900987 hasConceptScore W3116900987C49040817 @default.
- W3116900987 hasConceptScore W3116900987C50515024 @default.
- W3116900987 hasConceptScore W3116900987C89957378 @default.
- W3116900987 hasLocation W31169009871 @default.
- W3116900987 hasOpenAccess W3116900987 @default.
- W3116900987 hasPrimaryLocation W31169009871 @default.
- W3116900987 hasRelatedWork W1598778106 @default.
- W3116900987 hasRelatedWork W1990182792 @default.
- W3116900987 hasRelatedWork W2005450981 @default.
- W3116900987 hasRelatedWork W2032171111 @default.
- W3116900987 hasRelatedWork W2067129396 @default.
- W3116900987 hasRelatedWork W2074567709 @default.
- W3116900987 hasRelatedWork W2550572387 @default.
- W3116900987 hasRelatedWork W3116900987 @default.
- W3116900987 hasRelatedWork W4309739407 @default.
- W3116900987 hasRelatedWork W2188096570 @default.
- W3116900987 isParatext "false" @default.
- W3116900987 isRetracted "false" @default.
- W3116900987 magId "3116900987" @default.
- W3116900987 workType "book-chapter" @default.