Matches in SemOpenAlex for { <https://semopenalex.org/work/W3117844985> ?p ?o ?g. }
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- W3117844985 endingPage "012194" @default.
- W3117844985 startingPage "012194" @default.
- W3117844985 abstract "A kinetic model that describes the evolution of residual stress in thin polycrystalline films during bombardment by ions with energies below the sputtering threshold is presented. The mechanisms responsible for the change in stress are the generation of point defects on the surface and their redistribution over the film thickness along grain boundaries. The presented model was used to explain the experimental data on the change in stress in thin Cr films after treatment in Ar plasma of low-pressure RF induction discharge with ion energy of 15-30 eV." @default.
- W3117844985 created "2021-01-05" @default.
- W3117844985 creator A5080423463 @default.
- W3117844985 date "2020-12-01" @default.
- W3117844985 modified "2023-09-27" @default.
- W3117844985 title "The effect of low-energy ion bombardment on residual stress in thin metal films due to the generation of surface defects and their migration to the grain boundary" @default.
- W3117844985 cites W1986384223 @default.
- W3117844985 cites W2001675686 @default.
- W3117844985 cites W2011600906 @default.
- W3117844985 cites W2043881660 @default.
- W3117844985 cites W2056033646 @default.
- W3117844985 cites W2913733564 @default.
- W3117844985 doi "https://doi.org/10.1088/1742-6596/1695/1/012194" @default.
- W3117844985 hasPublicationYear "2020" @default.
- W3117844985 type Work @default.
- W3117844985 sameAs 3117844985 @default.
- W3117844985 citedByCount "0" @default.
- W3117844985 crossrefType "journal-article" @default.
- W3117844985 hasAuthorship W3117844985A5080423463 @default.
- W3117844985 hasBestOaLocation W31178449851 @default.
- W3117844985 hasConcept C121332964 @default.
- W3117844985 hasConcept C135889238 @default.
- W3117844985 hasConcept C137637335 @default.
- W3117844985 hasConcept C138885662 @default.
- W3117844985 hasConcept C145148216 @default.
- W3117844985 hasConcept C159985019 @default.
- W3117844985 hasConcept C164675345 @default.
- W3117844985 hasConcept C171250308 @default.
- W3117844985 hasConcept C17744445 @default.
- W3117844985 hasConcept C178790620 @default.
- W3117844985 hasConcept C185592680 @default.
- W3117844985 hasConcept C19067145 @default.
- W3117844985 hasConcept C191897082 @default.
- W3117844985 hasConcept C192562407 @default.
- W3117844985 hasConcept C199539241 @default.
- W3117844985 hasConcept C21036866 @default.
- W3117844985 hasConcept C22423302 @default.
- W3117844985 hasConcept C26873012 @default.
- W3117844985 hasConcept C37292000 @default.
- W3117844985 hasConcept C41895202 @default.
- W3117844985 hasConcept C47908070 @default.
- W3117844985 hasConcept C62520636 @default.
- W3117844985 hasConcept C74080474 @default.
- W3117844985 hasConcept C87976508 @default.
- W3117844985 hasConcept C94625758 @default.
- W3117844985 hasConceptScore W3117844985C121332964 @default.
- W3117844985 hasConceptScore W3117844985C135889238 @default.
- W3117844985 hasConceptScore W3117844985C137637335 @default.
- W3117844985 hasConceptScore W3117844985C138885662 @default.
- W3117844985 hasConceptScore W3117844985C145148216 @default.
- W3117844985 hasConceptScore W3117844985C159985019 @default.
- W3117844985 hasConceptScore W3117844985C164675345 @default.
- W3117844985 hasConceptScore W3117844985C171250308 @default.
- W3117844985 hasConceptScore W3117844985C17744445 @default.
- W3117844985 hasConceptScore W3117844985C178790620 @default.
- W3117844985 hasConceptScore W3117844985C185592680 @default.
- W3117844985 hasConceptScore W3117844985C19067145 @default.
- W3117844985 hasConceptScore W3117844985C191897082 @default.
- W3117844985 hasConceptScore W3117844985C192562407 @default.
- W3117844985 hasConceptScore W3117844985C199539241 @default.
- W3117844985 hasConceptScore W3117844985C21036866 @default.
- W3117844985 hasConceptScore W3117844985C22423302 @default.
- W3117844985 hasConceptScore W3117844985C26873012 @default.
- W3117844985 hasConceptScore W3117844985C37292000 @default.
- W3117844985 hasConceptScore W3117844985C41895202 @default.
- W3117844985 hasConceptScore W3117844985C47908070 @default.
- W3117844985 hasConceptScore W3117844985C62520636 @default.
- W3117844985 hasConceptScore W3117844985C74080474 @default.
- W3117844985 hasConceptScore W3117844985C87976508 @default.
- W3117844985 hasConceptScore W3117844985C94625758 @default.
- W3117844985 hasLocation W31178449851 @default.
- W3117844985 hasOpenAccess W3117844985 @default.
- W3117844985 hasPrimaryLocation W31178449851 @default.
- W3117844985 hasRelatedWork W11496378 @default.
- W3117844985 hasRelatedWork W1426046 @default.
- W3117844985 hasRelatedWork W35976000 @default.
- W3117844985 hasRelatedWork W44457218 @default.
- W3117844985 hasRelatedWork W45621246 @default.
- W3117844985 hasRelatedWork W50928793 @default.
- W3117844985 hasRelatedWork W5247636 @default.
- W3117844985 hasRelatedWork W8893688 @default.
- W3117844985 hasRelatedWork W9583121 @default.
- W3117844985 hasRelatedWork W17807242 @default.
- W3117844985 hasVolume "1695" @default.
- W3117844985 isParatext "false" @default.
- W3117844985 isRetracted "false" @default.
- W3117844985 magId "3117844985" @default.
- W3117844985 workType "article" @default.