Matches in SemOpenAlex for { <https://semopenalex.org/work/W3117996965> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W3117996965 endingPage "235202" @default.
- W3117996965 startingPage "235202" @default.
- W3117996965 abstract "Extreme ultraviolet (EUV) lithography at λ =6.7 nm is a challenging subject for next generation semiconductor lithography beyond 13.5 nm. The availability of strong radiation at the operating wavelength and low-debris of the plasma source are the two most important aspects for the development of laser-produced Gd plasma source at 6.7 nm. In this paper, experimental research on the extreme ultraviolet source based on the laser-produced Gd plasma is performed. Strong radiation near 6.7 nm from the source has been obtained, which is attributed to the n=4-n=4 transitions in Gd ions that overlap to yield an intense unresolved transition array (UTA). Dependence of spectral variation near the strong emission region of Gd plasma on the incident laser power density and detection angles is given. It is found that the intensity of EUV radiation around 6.7 nm is increased with increasing laser power density, and the emission peak around 7.1 nm increases faster than that of emission peak around 6.7 nm after the laser intensity reaching 6.4×1011 W/cm2, which is ascribed to the unique spectroscopic behavior of Gd ions. In addition, the energy of the ion debris from laser-produced Gd plasma source as well as the angular distribution of the ion yield off the target normal are measured with Faraday cup. Results show that the ion energy corresponding to the peak position of Gd ion energy distribution is about 2.6 keV at 10° off the target normal, and the yield of Gd ions decreases with the increase of the angle from the target normal. Furthermore, the stopping ability of an ambient magnetic field for ion debris from laser Gd plasma source is evaluated, and the result shows that the energetic Gd ion can be effectively mitigated by applying a 0.9 T magnetic field." @default.
- W3117996965 created "2021-01-05" @default.
- W3117996965 creator A5000881841 @default.
- W3117996965 creator A5036616000 @default.
- W3117996965 creator A5052766236 @default.
- W3117996965 creator A5081945034 @default.
- W3117996965 creator A5083061699 @default.
- W3117996965 date "2015-01-01" @default.
- W3117996965 modified "2023-09-25" @default.
- W3117996965 title "Experimental research on laser-produced Gd target plasma source for 6.7 nm lithography" @default.
- W3117996965 cites W1553713051 @default.
- W3117996965 cites W2007132067 @default.
- W3117996965 cites W2009264866 @default.
- W3117996965 cites W2009661515 @default.
- W3117996965 cites W2020594338 @default.
- W3117996965 cites W2028231663 @default.
- W3117996965 cites W2045185946 @default.
- W3117996965 cites W2045812331 @default.
- W3117996965 cites W2054081274 @default.
- W3117996965 cites W2057913038 @default.
- W3117996965 cites W2095580762 @default.
- W3117996965 cites W2108704726 @default.
- W3117996965 cites W2132432746 @default.
- W3117996965 cites W2139283326 @default.
- W3117996965 cites W3067024862 @default.
- W3117996965 cites W4248290540 @default.
- W3117996965 cites W572400454 @default.
- W3117996965 doi "https://doi.org/10.7498/aps.64.235202" @default.
- W3117996965 hasPublicationYear "2015" @default.
- W3117996965 type Work @default.
- W3117996965 sameAs 3117996965 @default.
- W3117996965 citedByCount "0" @default.
- W3117996965 crossrefType "journal-article" @default.
- W3117996965 hasAuthorship W3117996965A5000881841 @default.
- W3117996965 hasAuthorship W3117996965A5036616000 @default.
- W3117996965 hasAuthorship W3117996965A5052766236 @default.
- W3117996965 hasAuthorship W3117996965A5081945034 @default.
- W3117996965 hasAuthorship W3117996965A5083061699 @default.
- W3117996965 hasBestOaLocation W31179969651 @default.
- W3117996965 hasConcept C120665830 @default.
- W3117996965 hasConcept C121332964 @default.
- W3117996965 hasConcept C145148216 @default.
- W3117996965 hasConcept C146024833 @default.
- W3117996965 hasConcept C162996421 @default.
- W3117996965 hasConcept C163258240 @default.
- W3117996965 hasConcept C180541544 @default.
- W3117996965 hasConcept C184779094 @default.
- W3117996965 hasConcept C192562407 @default.
- W3117996965 hasConcept C21881925 @default.
- W3117996965 hasConcept C49040817 @default.
- W3117996965 hasConcept C50774322 @default.
- W3117996965 hasConcept C520434653 @default.
- W3117996965 hasConcept C62520636 @default.
- W3117996965 hasConcept C82706917 @default.
- W3117996965 hasConceptScore W3117996965C120665830 @default.
- W3117996965 hasConceptScore W3117996965C121332964 @default.
- W3117996965 hasConceptScore W3117996965C145148216 @default.
- W3117996965 hasConceptScore W3117996965C146024833 @default.
- W3117996965 hasConceptScore W3117996965C162996421 @default.
- W3117996965 hasConceptScore W3117996965C163258240 @default.
- W3117996965 hasConceptScore W3117996965C180541544 @default.
- W3117996965 hasConceptScore W3117996965C184779094 @default.
- W3117996965 hasConceptScore W3117996965C192562407 @default.
- W3117996965 hasConceptScore W3117996965C21881925 @default.
- W3117996965 hasConceptScore W3117996965C49040817 @default.
- W3117996965 hasConceptScore W3117996965C50774322 @default.
- W3117996965 hasConceptScore W3117996965C520434653 @default.
- W3117996965 hasConceptScore W3117996965C62520636 @default.
- W3117996965 hasConceptScore W3117996965C82706917 @default.
- W3117996965 hasIssue "23" @default.
- W3117996965 hasLocation W31179969651 @default.
- W3117996965 hasOpenAccess W3117996965 @default.
- W3117996965 hasPrimaryLocation W31179969651 @default.
- W3117996965 hasRelatedWork W1886155521 @default.
- W3117996965 hasRelatedWork W1985524521 @default.
- W3117996965 hasRelatedWork W1985850725 @default.
- W3117996965 hasRelatedWork W2015001424 @default.
- W3117996965 hasRelatedWork W2015038201 @default.
- W3117996965 hasRelatedWork W2059060283 @default.
- W3117996965 hasRelatedWork W2762064598 @default.
- W3117996965 hasRelatedWork W2788885654 @default.
- W3117996965 hasRelatedWork W3117996965 @default.
- W3117996965 hasRelatedWork W1597348517 @default.
- W3117996965 hasVolume "64" @default.
- W3117996965 isParatext "false" @default.
- W3117996965 isRetracted "false" @default.
- W3117996965 magId "3117996965" @default.
- W3117996965 workType "article" @default.