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• W3118336253 abstract "Nested structures inside the hard material play a pivotal role in the microfluidics systems, such as the microvalve and the micropump. In this article, we demonstrate a novel and facile method of fabricating nested structures inside the fused silica with a two-step process femtosecond laser wet etching (FLWE) process. Inside fused silica, a spherical structure was made with a diameter of nearly 80 µm in a square chamber. In addition, we designed a simple microvalve with this sphere controlling the current’s flow. The novel microvalve structure can be easily integrated into the functional microfluidics systems and will be widely applied in the Lab-on-chip (LOC) system." @default.
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• W3118336253 date "2021-01-01" @default.
• W3118336253 modified "2023-10-16" @default.
• W3118336253 title "Fabrication of Three-Dimensional Microvalves of Internal Nested Structures Inside Fused Silica" @default.
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• W3118336253 doi "https://doi.org/10.3390/mi12010043" @default.
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