Matches in SemOpenAlex for { <https://semopenalex.org/work/W3119042621> ?p ?o ?g. }
- W3119042621 endingPage "3403" @default.
- W3119042621 startingPage "3397" @default.
- W3119042621 abstract "Hafnium zirconium oxide (HZO) is promising for applications in future memory devices and energy storage and harvesting. While many studies have focused upon the dielectric and structural properties of HZO, much less investigated are their thermal properties, particularly in thin-film form. We present the first report on the thermal conductivity of plasma-enhanced atomic layer deposited (PEALD) HZO thin films. Steady-state thermoreflectance measures the effective thermal conductivity of undoped and yttrium-doped HZO films and their interfaces. The effective thermal conductivity of the undoped film is found to be 0.75 W m–1 K–1, which is comparable to those reported previously for thermal ALD HZO films with similar composition. With increasing yttrium doping level, the effective thermal conductivity slightly decreases down to 0.67 W m–1 K–1 owing to dopant scattering of phonons. Our PEALD HZO films are nanocrystalline as observed by grazing-incidence X-ray diffraction and transmission electron microscopy." @default.
- W3119042621 created "2021-01-18" @default.
- W3119042621 creator A5004181877 @default.
- W3119042621 creator A5018198374 @default.
- W3119042621 creator A5054105523 @default.
- W3119042621 creator A5079002308 @default.
- W3119042621 creator A5088760104 @default.
- W3119042621 creator A5091510154 @default.
- W3119042621 date "2021-06-01" @default.
- W3119042621 modified "2023-10-18" @default.
- W3119042621 title "Thermal conductivity of plasma-enhanced atomic layer deposited hafnium zirconium oxide dielectric thin films" @default.
- W3119042621 cites W1950076970 @default.
- W3119042621 cites W1964279772 @default.
- W3119042621 cites W1973751801 @default.
- W3119042621 cites W1988330685 @default.
- W3119042621 cites W1988644795 @default.
- W3119042621 cites W1993491093 @default.
- W3119042621 cites W1993614411 @default.
- W3119042621 cites W2009590881 @default.
- W3119042621 cites W2023603575 @default.
- W3119042621 cites W2025194570 @default.
- W3119042621 cites W2031744216 @default.
- W3119042621 cites W2036784309 @default.
- W3119042621 cites W2042108567 @default.
- W3119042621 cites W2042565601 @default.
- W3119042621 cites W2053674573 @default.
- W3119042621 cites W2057838896 @default.
- W3119042621 cites W2058043629 @default.
- W3119042621 cites W2058676669 @default.
- W3119042621 cites W2062261118 @default.
- W3119042621 cites W2075818531 @default.
- W3119042621 cites W2082023980 @default.
- W3119042621 cites W2091830839 @default.
- W3119042621 cites W2111138496 @default.
- W3119042621 cites W2112554416 @default.
- W3119042621 cites W2120491593 @default.
- W3119042621 cites W2138421559 @default.
- W3119042621 cites W2158453890 @default.
- W3119042621 cites W2158932701 @default.
- W3119042621 cites W2175085753 @default.
- W3119042621 cites W2318322252 @default.
- W3119042621 cites W2318767045 @default.
- W3119042621 cites W2410675926 @default.
- W3119042621 cites W2532307801 @default.
- W3119042621 cites W2586566579 @default.
- W3119042621 cites W2604423572 @default.
- W3119042621 cites W2610849061 @default.
- W3119042621 cites W2621540248 @default.
- W3119042621 cites W2761644466 @default.
- W3119042621 cites W2775351004 @default.
- W3119042621 cites W2792266916 @default.
- W3119042621 cites W2796474669 @default.
- W3119042621 cites W2799608287 @default.
- W3119042621 cites W2799835424 @default.
- W3119042621 cites W2801223857 @default.
- W3119042621 cites W2807864146 @default.
- W3119042621 cites W2894197608 @default.
- W3119042621 cites W2898379541 @default.
- W3119042621 cites W2899663127 @default.
- W3119042621 cites W2912125262 @default.
- W3119042621 cites W2919111822 @default.
- W3119042621 cites W2919742825 @default.
- W3119042621 cites W2982989577 @default.
- W3119042621 cites W3027990810 @default.
- W3119042621 cites W3028493745 @default.
- W3119042621 cites W3035817395 @default.
- W3119042621 doi "https://doi.org/10.1016/j.jeurceramsoc.2020.12.053" @default.
- W3119042621 hasPublicationYear "2021" @default.
- W3119042621 type Work @default.
- W3119042621 sameAs 3119042621 @default.
- W3119042621 citedByCount "3" @default.
- W3119042621 countsByYear W31190426212022 @default.
- W3119042621 countsByYear W31190426212023 @default.
- W3119042621 crossrefType "journal-article" @default.
- W3119042621 hasAuthorship W3119042621A5004181877 @default.
- W3119042621 hasAuthorship W3119042621A5018198374 @default.
- W3119042621 hasAuthorship W3119042621A5054105523 @default.
- W3119042621 hasAuthorship W3119042621A5079002308 @default.
- W3119042621 hasAuthorship W3119042621A5088760104 @default.
- W3119042621 hasAuthorship W3119042621A5091510154 @default.
- W3119042621 hasBestOaLocation W31190426211 @default.
- W3119042621 hasConcept C113196181 @default.
- W3119042621 hasConcept C133386390 @default.
- W3119042621 hasConcept C140676511 @default.
- W3119042621 hasConcept C159985019 @default.
- W3119042621 hasConcept C171250308 @default.
- W3119042621 hasConcept C185592680 @default.
- W3119042621 hasConcept C19067145 @default.
- W3119042621 hasConcept C191897082 @default.
- W3119042621 hasConcept C191952053 @default.
- W3119042621 hasConcept C192562407 @default.
- W3119042621 hasConcept C2779227376 @default.
- W3119042621 hasConcept C2779851234 @default.
- W3119042621 hasConcept C43617362 @default.
- W3119042621 hasConcept C49040817 @default.
- W3119042621 hasConcept C531131001 @default.
- W3119042621 hasConcept C534791751 @default.
- W3119042621 hasConcept C546638069 @default.