Matches in SemOpenAlex for { <https://semopenalex.org/work/W3119052007> ?p ?o ?g. }
- W3119052007 endingPage "117046" @default.
- W3119052007 startingPage "117046" @default.
- W3119052007 abstract "Laser induced backside wet etching (LIBWE), a simple-setup process capable of processing transparent materials, has been studied to overcome difficulties in glass micromachining. However, LIBWE still show practical difficulty in machining various glass applications due to the crack occurrence and unprecise final geometry. This study proposes the error-compensating scan path generation method for the precise fabrication of glass microstructures without additional devices. In conventional scan paths, the overlap of scan path’s initial and final points, constant scan path patterns and uneven distributions of laser irradiation were the leading causes of geometric errors. The scan path generation method was developed to minimize or eliminate the causes of geometric errors in conventional scan path methods. Machined results, with error-compensating scan path, showed the removal of significant error from conventional paths with proper material removal rates. The effects of scan path generation parameters on the machining characteristics were also investigated. By adjusting the scan duty ratio and laser irradiation distribution of the entire scan path, micropockets with an average surface roughness of 0.26 μm could be processed at a material removal rate of 29,700 μm3/s. Based on machining characteristics of the error-compensating scan path, various glass microstructures were fabricated and the feasibility of the proposed method was verified." @default.
- W3119052007 created "2021-01-18" @default.
- W3119052007 creator A5020885918 @default.
- W3119052007 creator A5022739413 @default.
- W3119052007 creator A5052973006 @default.
- W3119052007 creator A5058707336 @default.
- W3119052007 creator A5066231106 @default.
- W3119052007 date "2021-05-01" @default.
- W3119052007 modified "2023-10-05" @default.
- W3119052007 title "Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path" @default.
- W3119052007 cites W1963864733 @default.
- W3119052007 cites W2022883229 @default.
- W3119052007 cites W2044249325 @default.
- W3119052007 cites W2050888218 @default.
- W3119052007 cites W2050984172 @default.
- W3119052007 cites W2069464566 @default.
- W3119052007 cites W2081124609 @default.
- W3119052007 cites W2314601697 @default.
- W3119052007 cites W2407480666 @default.
- W3119052007 cites W2619685371 @default.
- W3119052007 cites W2735947206 @default.
- W3119052007 cites W2744322366 @default.
- W3119052007 cites W2765629951 @default.
- W3119052007 cites W2785611117 @default.
- W3119052007 cites W2886619128 @default.
- W3119052007 cites W2899709133 @default.
- W3119052007 cites W2914755474 @default.
- W3119052007 cites W2950629902 @default.
- W3119052007 cites W2967749786 @default.
- W3119052007 cites W2984256552 @default.
- W3119052007 cites W2991339150 @default.
- W3119052007 cites W3027060995 @default.
- W3119052007 cites W3042277896 @default.
- W3119052007 doi "https://doi.org/10.1016/j.jmatprotec.2021.117046" @default.
- W3119052007 hasPublicationYear "2021" @default.
- W3119052007 type Work @default.
- W3119052007 sameAs 3119052007 @default.
- W3119052007 citedByCount "10" @default.
- W3119052007 countsByYear W31190520072021 @default.
- W3119052007 countsByYear W31190520072022 @default.
- W3119052007 countsByYear W31190520072023 @default.
- W3119052007 crossrefType "journal-article" @default.
- W3119052007 hasAuthorship W3119052007A5020885918 @default.
- W3119052007 hasAuthorship W3119052007A5022739413 @default.
- W3119052007 hasAuthorship W3119052007A5052973006 @default.
- W3119052007 hasAuthorship W3119052007A5058707336 @default.
- W3119052007 hasAuthorship W3119052007A5066231106 @default.
- W3119052007 hasBestOaLocation W31190520071 @default.
- W3119052007 hasConcept C100460472 @default.
- W3119052007 hasConcept C107365816 @default.
- W3119052007 hasConcept C120665830 @default.
- W3119052007 hasConcept C121332964 @default.
- W3119052007 hasConcept C129045301 @default.
- W3119052007 hasConcept C136525101 @default.
- W3119052007 hasConcept C142724271 @default.
- W3119052007 hasConcept C159985019 @default.
- W3119052007 hasConcept C191897082 @default.
- W3119052007 hasConcept C192562407 @default.
- W3119052007 hasConcept C199360897 @default.
- W3119052007 hasConcept C204787440 @default.
- W3119052007 hasConcept C2777735758 @default.
- W3119052007 hasConcept C2779227376 @default.
- W3119052007 hasConcept C41008148 @default.
- W3119052007 hasConcept C520434653 @default.
- W3119052007 hasConcept C523214423 @default.
- W3119052007 hasConcept C71924100 @default.
- W3119052007 hasConceptScore W3119052007C100460472 @default.
- W3119052007 hasConceptScore W3119052007C107365816 @default.
- W3119052007 hasConceptScore W3119052007C120665830 @default.
- W3119052007 hasConceptScore W3119052007C121332964 @default.
- W3119052007 hasConceptScore W3119052007C129045301 @default.
- W3119052007 hasConceptScore W3119052007C136525101 @default.
- W3119052007 hasConceptScore W3119052007C142724271 @default.
- W3119052007 hasConceptScore W3119052007C159985019 @default.
- W3119052007 hasConceptScore W3119052007C191897082 @default.
- W3119052007 hasConceptScore W3119052007C192562407 @default.
- W3119052007 hasConceptScore W3119052007C199360897 @default.
- W3119052007 hasConceptScore W3119052007C204787440 @default.
- W3119052007 hasConceptScore W3119052007C2777735758 @default.
- W3119052007 hasConceptScore W3119052007C2779227376 @default.
- W3119052007 hasConceptScore W3119052007C41008148 @default.
- W3119052007 hasConceptScore W3119052007C520434653 @default.
- W3119052007 hasConceptScore W3119052007C523214423 @default.
- W3119052007 hasConceptScore W3119052007C71924100 @default.
- W3119052007 hasFunder F4320322120 @default.
- W3119052007 hasLocation W31190520071 @default.
- W3119052007 hasOpenAccess W3119052007 @default.
- W3119052007 hasPrimaryLocation W31190520071 @default.
- W3119052007 hasRelatedWork W2003495719 @default.
- W3119052007 hasRelatedWork W2130449497 @default.
- W3119052007 hasRelatedWork W242680737 @default.
- W3119052007 hasRelatedWork W2745790210 @default.
- W3119052007 hasRelatedWork W2882991331 @default.
- W3119052007 hasRelatedWork W3014937519 @default.
- W3119052007 hasRelatedWork W3108210911 @default.
- W3119052007 hasRelatedWork W3204749931 @default.
- W3119052007 hasRelatedWork W3215405554 @default.
- W3119052007 hasRelatedWork W2183370071 @default.