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- W3119078154 abstract "在完全掌握瓦里安300XP离子注入机各部件的工作原理后, 将原离子源供电系统中500 W电流源和450 W起弧电源升级为1 500 W电流源和1 500 W起弧电源, 并集成到当前系统中.将现有不稳定的气体流量、离子源电源、分析器、源磁场和吸极高压塑料光纤隔离控制线路, 升级成多通道光纤通讯光端机隔离控制系统.将一个10 cm进样终端改造成15 cm的样品卡盘, 并开发了一套独立控制剂量监测系统.改造后, 硼最大束流超过150 μA, 且可调节. 15 cm圆片的片内及片间电阻不均匀性小于3.5%.利用大束流硼离子注入制备浓硼掺杂单晶硅结构层, 应用到微电子机械系统压力传感器、热电器件以及纳米谐振子器件中." @default.
- W3119078154 created "2021-01-18" @default.
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- W3119078154 date "2020-09-30" @default.
- W3119078154 modified "2023-09-23" @default.
- W3119078154 title "Reformation and Function Development of Varian 300XP Ion Implanter" @default.
- W3119078154 doi "https://doi.org/10.16495/j.1006-3757.2020.03.001" @default.
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