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- W3119702749 abstract "Interplay between preferential sputtering of multicomponent solids and topology of sputtered surface has been studied using a sequence of IVB tellurides PbTe, SnTe, and GeTe. The first experimental observation of the impact of near-non-preferential sputtering on the surface topology of multicomponent materials was made. In the example of SnTe, it was found that a sputtered surface resulting from its near-non-preferential sputtering is always covered with a dense array of cones of nanometer range of height. This observation opens the possibility for the simple method of formation of dense arrays of conical structures on solid surfaces by ordinary ion beam sputtering. Our experimental results show that to achieve this, a multicomponent composition, constituents of which are sputtered near-non-preferentially, has to be created. • The phenomenon of conical surface topology formation due to non-preferential sputtering of multicomponent solid is discovered. • It is found that SnTe is a suitable material for such formation. • This opens a simple way for production of dense cone shape arrays on the sputtered surfaces." @default.
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- W3119702749 date "2021-04-01" @default.
- W3119702749 modified "2023-10-16" @default.
- W3119702749 title "Near-non-preferential sputtering of multicomponent solids as an effective way for production of dense cone shape arrays on a sputtered surface" @default.
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- W3119702749 doi "https://doi.org/10.1016/j.vacuum.2021.110058" @default.
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