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• W3120485010 endingPage "488" @default.
• W3120485010 startingPage "481" @default.
• W3120485010 abstract "Diborane (B2H6) is a promising molecular precursor for atomic precision p-type doping of silicon that has recently been experimentally demonstrated [Škereň Nat. Electron. 2020]. We use density functional theory (DFT) calculations to determine the reaction pathway for diborane dissociating into a species that will incorporate as electrically active substitutional boron after adsorbing onto the Si(100)-2×1 surface. Our calculations indicate that diborane must overcome an energy barrier to adsorb, explaining the experimentally observed low sticking coefficient (<1 × 10–4 at room temperature) and suggesting that heating can be used to increase the adsorption rate. Upon sticking, diborane has an ≈50% chance of splitting into two BH3 fragments versus merely losing hydrogen to form a dimer such as B2H4. As boron dimers are likely electrically inactive, whether this latter reaction occurs is shown to be predictive of the incorporation rate. The dissociation process proceeds with significant energy barriers, necessitating the use of high temperatures for incorporation. Using the barriers calculated from DFT, we parameterize a Kinetic Monte Carlo model that predicts the incorporation statistics of boron as a function of the initial depassivation geometry, dose, and anneal temperature. Our results suggest that the dimer nature of diborane inherently limits its doping density as an acceptor precursor and furthermore that heating the boron dimers to split before exposure to silicon can lead to poor selectivity on hydrogen and halogen resists. This suggests that, while diborane works as an atomic precision acceptor precursor, other non-dimerized acceptor precursors may lead to higher incorporation rates at lower temperatures." @default.
• W3120485010 created "2021-01-18" @default.
• W3120485010 creator A5011607899 @default.
• W3120485010 creator A5013279300 @default.
• W3120485010 creator A5021331771 @default.
• W3120485010 creator A5027086751 @default.
• W3120485010 creator A5091044588 @default.
• W3120485010 creator A5091194643 @default.
• W3120485010 date "2021-01-06" @default.
• W3120485010 modified "2023-09-23" @default.
• W3120485010 title "A Model for Atomic Precision p-Type Doping with Diborane on Si(100)-2×1" @default.
• W3120485010 cites W1678574344 @default.
• W3120485010 cites W1971224549 @default.
• W3120485010 cites W1977487692 @default.
• W3120485010 cites W1981368803 @default.
• W3120485010 cites W1982153874 @default.
• W3120485010 cites W1989416179 @default.
• W3120485010 cites W1993641275 @default.
• W3120485010 cites W2000562603 @default.
• W3120485010 cites W2012395578 @default.
• W3120485010 cites W2032589911 @default.
• W3120485010 cites W2032715055 @default.
• W3120485010 cites W2033013230 @default.
• W3120485010 cites W2036113194 @default.
• W3120485010 cites W2042321087 @default.
• W3120485010 cites W2044591029 @default.
• W3120485010 cites W2068631415 @default.
• W3120485010 cites W2084848056 @default.
• W3120485010 cites W2088765682 @default.
• W3120485010 cites W2089241239 @default.
• W3120485010 cites W2095921114 @default.
• W3120485010 cites W2120145199 @default.
• W3120485010 cites W2230554001 @default.
• W3120485010 cites W2292538908 @default.
• W3120485010 cites W2313156362 @default.
• W3120485010 cites W2316794821 @default.
• W3120485010 cites W2767044503 @default.
• W3120485010 cites W2780478410 @default.
• W3120485010 cites W2892704307 @default.
• W3120485010 cites W2966993487 @default.
• W3120485010 cites W2985054908 @default.
• W3120485010 cites W3009597978 @default.
• W3120485010 cites W3033650946 @default.
• W3120485010 cites W3098712504 @default.
• W3120485010 cites W3100801556 @default.
• W3120485010 cites W3214029865 @default.
• W3120485010 cites W4253789658 @default.
• W3120485010 doi "https://doi.org/10.1021/acs.jpcc.0c08919" @default.
• W3120485010 hasPublicationYear "2021" @default.
• W3120485010 type Work @default.
• W3120485010 sameAs 3120485010 @default.
• W3120485010 citedByCount "11" @default.
• W3120485010 countsByYear W31204850102021 @default.
• W3120485010 countsByYear W31204850102022 @default.
• W3120485010 countsByYear W31204850102023 @default.
• W3120485010 crossrefType "journal-article" @default.
• W3120485010 hasAuthorship W3120485010A5011607899 @default.
• W3120485010 hasAuthorship W3120485010A5013279300 @default.
• W3120485010 hasAuthorship W3120485010A5021331771 @default.
• W3120485010 hasAuthorship W3120485010A5027086751 @default.
• W3120485010 hasAuthorship W3120485010A5091044588 @default.
• W3120485010 hasAuthorship W3120485010A5091194643 @default.
• W3120485010 hasBestOaLocation W31204850103 @default.
• W3120485010 hasConcept C102931765 @default.
• W3120485010 hasConcept C121332964 @default.
• W3120485010 hasConcept C147597530 @default.
• W3120485010 hasConcept C147789679 @default.
• W3120485010 hasConcept C150394285 @default.
• W3120485010 hasConcept C152365726 @default.
• W3120485010 hasConcept C162711632 @default.
• W3120485010 hasConcept C178790620 @default.
• W3120485010 hasConcept C185592680 @default.
• W3120485010 hasConcept C192562407 @default.
• W3120485010 hasConcept C26873012 @default.
• W3120485010 hasConcept C2778072282 @default.
• W3120485010 hasConcept C2779546866 @default.
• W3120485010 hasConcept C2779892579 @default.
• W3120485010 hasConcept C49040817 @default.
• W3120485010 hasConcept C501308230 @default.
• W3120485010 hasConcept C512968161 @default.
• W3120485010 hasConcept C544956773 @default.
• W3120485010 hasConcept C57863236 @default.
• W3120485010 hasConcept C9950777 @default.
• W3120485010 hasConceptScore W3120485010C102931765 @default.
• W3120485010 hasConceptScore W3120485010C121332964 @default.
• W3120485010 hasConceptScore W3120485010C147597530 @default.
• W3120485010 hasConceptScore W3120485010C147789679 @default.
• W3120485010 hasConceptScore W3120485010C150394285 @default.
• W3120485010 hasConceptScore W3120485010C152365726 @default.
• W3120485010 hasConceptScore W3120485010C162711632 @default.
• W3120485010 hasConceptScore W3120485010C178790620 @default.
• W3120485010 hasConceptScore W3120485010C185592680 @default.
• W3120485010 hasConceptScore W3120485010C192562407 @default.
• W3120485010 hasConceptScore W3120485010C26873012 @default.
• W3120485010 hasConceptScore W3120485010C2778072282 @default.
• W3120485010 hasConceptScore W3120485010C2779546866 @default.
• W3120485010 hasConceptScore W3120485010C2779892579 @default.
• W3120485010 hasConceptScore W3120485010C49040817 @default.

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