Matches in SemOpenAlex for { <https://semopenalex.org/work/W3120635960> ?p ?o ?g. }
Showing items 1 to 71 of
71
with 100 items per page.
- W3120635960 abstract "Abstract This paper is concerned with characterization and failure analysis challenges posed by 3D integration of semiconductor devices, with a particular focus on wafer bonded components and Through Silicon Vias (TSV). Requirements for sample preparation are discussed, along with advantages and limitations exhibited by various different techniques. Analysis examples with real devices are presented, along with successful sample preparation solutions enabled by a precision polishing toolset." @default.
- W3120635960 created "2021-01-18" @default.
- W3120635960 creator A5026691381 @default.
- W3120635960 creator A5038935326 @default.
- W3120635960 creator A5041053673 @default.
- W3120635960 creator A5048849513 @default.
- W3120635960 creator A5050457679 @default.
- W3120635960 creator A5054406812 @default.
- W3120635960 creator A5068302131 @default.
- W3120635960 creator A5071321076 @default.
- W3120635960 date "2008-11-01" @default.
- W3120635960 modified "2023-09-27" @default.
- W3120635960 title "Characterization and Failure Analysis of Wafer Bonded Devices and Unfilled Through-Silicon-Vias (TSVs)" @default.
- W3120635960 doi "https://doi.org/10.31399/asm.cp.istfa2008p0368" @default.
- W3120635960 hasPublicationYear "2008" @default.
- W3120635960 type Work @default.
- W3120635960 sameAs 3120635960 @default.
- W3120635960 citedByCount "2" @default.
- W3120635960 countsByYear W31206359602012 @default.
- W3120635960 crossrefType "proceedings-article" @default.
- W3120635960 hasAuthorship W3120635960A5026691381 @default.
- W3120635960 hasAuthorship W3120635960A5038935326 @default.
- W3120635960 hasAuthorship W3120635960A5041053673 @default.
- W3120635960 hasAuthorship W3120635960A5048849513 @default.
- W3120635960 hasAuthorship W3120635960A5050457679 @default.
- W3120635960 hasAuthorship W3120635960A5054406812 @default.
- W3120635960 hasAuthorship W3120635960A5068302131 @default.
- W3120635960 hasAuthorship W3120635960A5071321076 @default.
- W3120635960 hasConcept C127413603 @default.
- W3120635960 hasConcept C160671074 @default.
- W3120635960 hasConcept C171250308 @default.
- W3120635960 hasConcept C192562407 @default.
- W3120635960 hasConcept C2780841128 @default.
- W3120635960 hasConcept C49040817 @default.
- W3120635960 hasConcept C544956773 @default.
- W3120635960 hasConcept C77595967 @default.
- W3120635960 hasConceptScore W3120635960C127413603 @default.
- W3120635960 hasConceptScore W3120635960C160671074 @default.
- W3120635960 hasConceptScore W3120635960C171250308 @default.
- W3120635960 hasConceptScore W3120635960C192562407 @default.
- W3120635960 hasConceptScore W3120635960C2780841128 @default.
- W3120635960 hasConceptScore W3120635960C49040817 @default.
- W3120635960 hasConceptScore W3120635960C544956773 @default.
- W3120635960 hasConceptScore W3120635960C77595967 @default.
- W3120635960 hasLocation W31206359601 @default.
- W3120635960 hasOpenAccess W3120635960 @default.
- W3120635960 hasPrimaryLocation W31206359601 @default.
- W3120635960 hasRelatedWork W1541015771 @default.
- W3120635960 hasRelatedWork W1983851959 @default.
- W3120635960 hasRelatedWork W2075238394 @default.
- W3120635960 hasRelatedWork W2077590194 @default.
- W3120635960 hasRelatedWork W2084960709 @default.
- W3120635960 hasRelatedWork W2098719343 @default.
- W3120635960 hasRelatedWork W2118526491 @default.
- W3120635960 hasRelatedWork W2125171137 @default.
- W3120635960 hasRelatedWork W2128930516 @default.
- W3120635960 hasRelatedWork W2134684847 @default.
- W3120635960 hasRelatedWork W2258540654 @default.
- W3120635960 hasRelatedWork W2330697734 @default.
- W3120635960 hasRelatedWork W2800817073 @default.
- W3120635960 hasRelatedWork W50048258 @default.
- W3120635960 hasRelatedWork W2096394981 @default.
- W3120635960 hasRelatedWork W2255036241 @default.
- W3120635960 hasRelatedWork W2304651159 @default.
- W3120635960 hasRelatedWork W2816936925 @default.
- W3120635960 hasRelatedWork W2839654781 @default.
- W3120635960 hasRelatedWork W2868015030 @default.
- W3120635960 isParatext "false" @default.
- W3120635960 isRetracted "false" @default.
- W3120635960 magId "3120635960" @default.
- W3120635960 workType "article" @default.