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- W3120643722 abstract "Abstract This paper describes a polygon micromotor scanner fabricated from single crystal silicon by deep reactive ion etching (DRIE) for in-plane scanning applications. The scanner consists of an outer-rotor wobble micromotor with a 1.4-mm diameter, 200-μm thick rotor. The outer-rotor design circumvents optical beam interference by wires or probes that provide electrical excitation to the motor. A variety of rotor polygon types were designed and fabricated, including those with three, four, six, and eight facets. After fabrication of the components, the scanners were assembled and operated for extended periods in room air using a typical drive signal of 60 V and achieving rotational speeds up to 58 rpm. The 1310-nm optical beam was reflected off the Al-coated sidewall of the polygon rotor using external optics, achieving optical coupling efficiencies of −5.8 dB and a scan angle of 50–110° depending on the number of facets employed. During dynamic optical measurements, 1.8-mm diameter gradient-index (GRIN) lenses were used as optical elements, and a repeatable signal was detected indicating less than 0.5° misalignment of the reflective surface due to rotor wobble or tilt." @default.
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- W3120643722 date "1998-06-08" @default.
- W3120643722 modified "2023-09-26" @default.
- W3120643722 title "High-Aspect-Ratio Rotary Polygon Micromotor Scanners" @default.
- W3120643722 doi "https://doi.org/10.31438/trf.hh1998.17" @default.
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