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- W3120710011 abstract "Gallium oxide (Ga2O3) is a natural candidate material for next-generation solar-blind photodetectors (PDs). At present, it remains challenging to tune a balanced performance with high responsivity and fast response speed for the metal-semiconductor-metal (MSM) PDs due to the specific internal gain and persistent photoconductivity (PPC) effect. Herein, a series of amorphous and β-phase Ga2O3 films with ultra-high transmittance (>95%) in the near ultraviolet–visible region are obtained by combing with magnetron sputtering and post-annealing. Then, we fabricated MSM solar-blind photodetectors based on amorphous and β-phase Ga2O3 films with different post-annealing temperatures. The results show that the amorphous Ga2O3 PD has higher responsivity (R), detectivity (D*) and external quantum efficiency (EQE), but its response speed is slow, and photo-to-dark current ratio (PDCR) and rejection ratio (R254/R365) are relatively low. In contrast, the devices fabricated based on high temperature annealed β-Ga2O3 films display faster response speed, higher PDCR and R254/R365, but lower R, D* and EQE. It is demonstrated that oxygen vacancies dominate the internal gain and PPC of the device, the concentration of which in turn determines the performance of the device. A β-Ga2O3 photodetector presented more balanced performance is obtained by properly controlling the concentration of oxygen vacancies." @default.
- W3120710011 created "2021-01-18" @default.
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- W3120710011 date "2021-02-01" @default.
- W3120710011 modified "2023-10-17" @default.
- W3120710011 title "Balanced performance for β-Ga2O3 solar blind photodetectors: The role of oxygen vacancies" @default.
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- W3120710011 doi "https://doi.org/10.1016/j.optmat.2021.110808" @default.
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