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- W3122078086 abstract "In this paper, a simplified process for TGV interposer is presented for RF applications. Sand blasting method and thinning/polishing process is utilized to form TGVs on Glass wafer. TGV interposer metallization of is realized with Al sputtering followed by wet chemical etching. Based on the process, TGV interposer is fabricated and the TGV sample measures about 361µm in the diameter at the front side, 85µm in the diameter on the back side, and 338 µm in the thickness. Effects of manufacture error due to sand blasting drilling on the electrical property of TGV at high frequency(1–40GHz) is investigated with simulation results." @default.
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- W3122078086 date "2016-01-01" @default.
- W3122078086 modified "2023-09-23" @default.
- W3122078086 title "Process Development of Through-Glass-Via (TGV) Interposer for Radio Frequency (RF) Applications" @default.
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