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• W3124302011 endingPage "195202" @default.
• W3124302011 startingPage "195202" @default.
• W3124302011 abstract "Abstract In this work, the ferroelectricity of hafnium zirconium oxide (Hf 0.5 Zr 0.5 O 2 , HZO) is enhanced by fluorine (F)-plasma treatment, which is used to fabricate MoS 2 negative-capacitance field-effect transistor. Measurements show that the subthreshold swing of the transistor is significantly reduced to 17.8 mV dec −1 over almost four orders of output current, as compared to its counterpart without the F-plasma treatment (37.4 mV dec −1 ). The involved mechanism is that during the F-plasma treatment, F atoms can be incorporated into the HZO bulk to passive its oxygen vacancies and interface traps, thus forming robust Zr–F and Hf–F bonds. Therefore, the F-plasma-treated HZO film exhibits much less oxygen vacancies than the untreated HZO film, which is beneficial to enhancing the amplification effect on the surface potential of the MoS 2 channel during the NC operation." @default.
• W3124302011 created "2021-02-01" @default.
• W3124302011 creator A5017344729 @default.
• W3124302011 creator A5019918915 @default.
• W3124302011 creator A5028062301 @default.
• W3124302011 creator A5044914665 @default.
• W3124302011 date "2021-03-04" @default.
• W3124302011 modified "2023-09-25" @default.
• W3124302011 title "Improved subthreshold swing of MoS₂ negative-capacitance transistor by fluorine-plasma treatment on ferroelectric Hf_0.5Zr_0.5O₂ gate dielectric" @default.
• W3124302011 cites W1487196268 @default.
• W3124302011 cites W1510063530 @default.
• W3124302011 cites W1972523103 @default.
• W3124302011 cites W1976716866 @default.
• W3124302011 cites W1985274647 @default.
• W3124302011 cites W1990230218 @default.
• W3124302011 cites W2014231066 @default.
• W3124302011 cites W2016106189 @default.
• W3124302011 cites W2021994802 @default.
• W3124302011 cites W2027244847 @default.
• W3124302011 cites W2029796162 @default.
• W3124302011 cites W2030237677 @default.
• W3124302011 cites W2038205520 @default.
• W3124302011 cites W2058202052 @default.
• W3124302011 cites W2065873526 @default.
• W3124302011 cites W2092582752 @default.
• W3124302011 cites W2103628032 @default.
• W3124302011 cites W2169038302 @default.
• W3124302011 cites W2281709849 @default.
• W3124302011 cites W2334220755 @default.
• W3124302011 cites W2468929476 @default.
• W3124302011 cites W2734532847 @default.
• W3124302011 cites W2735519424 @default.
• W3124302011 cites W2765526283 @default.
• W3124302011 cites W2773084460 @default.
• W3124302011 cites W2776963204 @default.
• W3124302011 cites W2792041473 @default.
• W3124302011 cites W2886998316 @default.
• W3124302011 cites W2899793470 @default.
• W3124302011 cites W2927133044 @default.
• W3124302011 cites W2979687584 @default.
• W3124302011 cites W3102637849 @default.
• W3124302011 cites W3104079565 @default.
• W3124302011 doi "https://doi.org/10.1088/1361-6528/abe0e3" @default.
• W3124302011 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/33508814" @default.
• W3124302011 hasPublicationYear "2021" @default.
• W3124302011 type Work @default.
• W3124302011 sameAs 3124302011 @default.
• W3124302011 citedByCount "2" @default.
• W3124302011 countsByYear W31243020112022 @default.
• W3124302011 countsByYear W31243020112023 @default.
• W3124302011 crossrefType "journal-article" @default.
• W3124302011 hasAuthorship W3124302011A5017344729 @default.
• W3124302011 hasAuthorship W3124302011A5019918915 @default.
• W3124302011 hasAuthorship W3124302011A5028062301 @default.
• W3124302011 hasAuthorship W3124302011A5044914665 @default.
• W3124302011 hasConcept C113196181 @default.
• W3124302011 hasConcept C119599485 @default.
• W3124302011 hasConcept C121332964 @default.
• W3124302011 hasConcept C127413603 @default.
• W3124302011 hasConcept C133386390 @default.
• W3124302011 hasConcept C145598152 @default.
• W3124302011 hasConcept C147789679 @default.
• W3124302011 hasConcept C165801399 @default.
• W3124302011 hasConcept C172385210 @default.
• W3124302011 hasConcept C17525397 @default.
• W3124302011 hasConcept C178790620 @default.
• W3124302011 hasConcept C185592680 @default.
• W3124302011 hasConcept C191897082 @default.
• W3124302011 hasConcept C192562407 @default.
• W3124302011 hasConcept C2779851234 @default.
• W3124302011 hasConcept C2982823382 @default.
• W3124302011 hasConcept C30066665 @default.
• W3124302011 hasConcept C43617362 @default.
• W3124302011 hasConcept C49040817 @default.
• W3124302011 hasConcept C506198293 @default.
• W3124302011 hasConcept C534791751 @default.
• W3124302011 hasConcept C540031477 @default.
• W3124302011 hasConcept C546638069 @default.
• W3124302011 hasConcept C62520636 @default.
• W3124302011 hasConcept C79090758 @default.
• W3124302011 hasConcept C82706917 @default.
• W3124302011 hasConceptScore W3124302011C113196181 @default.
• W3124302011 hasConceptScore W3124302011C119599485 @default.
• W3124302011 hasConceptScore W3124302011C121332964 @default.
• W3124302011 hasConceptScore W3124302011C127413603 @default.
• W3124302011 hasConceptScore W3124302011C133386390 @default.
• W3124302011 hasConceptScore W3124302011C145598152 @default.
• W3124302011 hasConceptScore W3124302011C147789679 @default.
• W3124302011 hasConceptScore W3124302011C165801399 @default.
• W3124302011 hasConceptScore W3124302011C172385210 @default.
• W3124302011 hasConceptScore W3124302011C17525397 @default.
• W3124302011 hasConceptScore W3124302011C178790620 @default.
• W3124302011 hasConceptScore W3124302011C185592680 @default.
• W3124302011 hasConceptScore W3124302011C191897082 @default.
• W3124302011 hasConceptScore W3124302011C192562407 @default.
• W3124302011 hasConceptScore W3124302011C2779851234 @default.
• W3124302011 hasConceptScore W3124302011C2982823382 @default.
• W3124302011 hasConceptScore W3124302011C30066665 @default.

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