SemOpenAlex |

SemOpenAlex

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3124345991> ?p ?o ?g. }

Showing items 1 to 100 of ±106 with 100 items per page.

W3124345991 endingPage "16735" @default.
W3124345991 startingPage "16728" @default.
W3124345991 abstract "Through-silicon via (TSV)-induced mechanical stress and electrical noise coupling effects on sub 5-nm node nanosheet field-effect transistors (NSFETs) were investigated comprehensively compared to fin-shaped FETs (FinFETs) using TCAD for heterogeneous 3D-ICs. TSV-induced channel length directional stress (S ZZ ) predominantly causes variations of on-state current (ΔI on ). NSFETs exhibit the greater ΔI on than FinFETs because electron velocities and densities in channels vary with respect to SZZ in the same directions for NSFETs but do the opposite for FinFETs. Nevertheless, TSV-induced mechanical stress is negligible when TSV is farther than keep-out zone. Meanwhile, TSV signals can be coupled to operating devices through substrate and induce capacitive and back-bias noise coupling currents (I cap , I b-b ). NSFETs exhibit the greater |I cap |/I on than FinFETs because its wider source/drain (S/D) epitaxies form larger depletion capacitances between drain and punch-through stopper (PTS). On the other hand, the |I b-b |/I on is smaller for NSFETs because its parasitic bottom transistor alleviates back-bias-induced potential barrier lowering. Furthermore, wide diameter of Cu of TSV increases |I b-b |/I on only, but short rise time of TSV signals increases both |I cap |/I on and |I b-b |/I on . Unfortunately, conventional devices cannot satisfy criterion for analog applications (|I cap , I b-b |/I on <; 0.5%); therefore, a new strategy inserting bottom oxide (BOX) beneath the S/D with undoped PTS is suggested. The |I cap |/I on for NSFETs decreases by undoped PTS, but not for FinFETs due to a remnant depletion capacitance between fin and PTS. The |I b-b |/I on for NSFETs decreases remarkably due to completely blocked I b-b path, but FinFETs still have I b-b path under the fin. Therefore, NSFETs with BOX and undoped PTS are the most suitable for sub 5-nm node heterogeneous 3D-IC, especially in analog applications." @default.
W3124345991 created "2021-02-01" @default.
W3124345991 creator A5034596702 @default.
W3124345991 creator A5051115409 @default.
W3124345991 creator A5056156000 @default.
W3124345991 date "2021-01-01" @default.
W3124345991 modified "2023-10-18" @default.
W3124345991 title "Analysis of TSV-Induced Mechanical Stress and Electrical Noise Coupling in Sub 5-nm Node Nanosheet FETs for Heterogeneous 3D-ICs" @default.
W3124345991 cites W1519358564 @default.
W3124345991 cites W1557994288 @default.
W3124345991 cites W1565628240 @default.
W3124345991 cites W1975768646 @default.
W3124345991 cites W1991924258 @default.
W3124345991 cites W2004199989 @default.
W3124345991 cites W2004305691 @default.
W3124345991 cites W2014485980 @default.
W3124345991 cites W2015122410 @default.
W3124345991 cites W2041799748 @default.
W3124345991 cites W2116654873 @default.
W3124345991 cites W2138711722 @default.
W3124345991 cites W2162517322 @default.
W3124345991 cites W2167539582 @default.
W3124345991 cites W2168183755 @default.
W3124345991 cites W2343045695 @default.
W3124345991 cites W2407989768 @default.
W3124345991 cites W2527225530 @default.
W3124345991 cites W2532209800 @default.
W3124345991 cites W2583675180 @default.
W3124345991 cites W2590680818 @default.
W3124345991 cites W2741571441 @default.
W3124345991 cites W2744406216 @default.
W3124345991 cites W2772942063 @default.
W3124345991 cites W2786636341 @default.
W3124345991 cites W2913404074 @default.
W3124345991 cites W2922525369 @default.
W3124345991 cites W2948702813 @default.
W3124345991 cites W2966350814 @default.
W3124345991 cites W2992316042 @default.
W3124345991 cites W2993909275 @default.
W3124345991 cites W3006333792 @default.
W3124345991 cites W3008067915 @default.
W3124345991 cites W4238619586 @default.
W3124345991 doi "https://doi.org/10.1109/access.2021.3053572" @default.
W3124345991 hasPublicationYear "2021" @default.
W3124345991 type Work @default.
W3124345991 sameAs 3124345991 @default.
W3124345991 citedByCount "2" @default.
W3124345991 countsByYear W31243459912021 @default.
W3124345991 crossrefType "journal-article" @default.
W3124345991 hasAuthorship W3124345991A5034596702 @default.
W3124345991 hasAuthorship W3124345991A5051115409 @default.
W3124345991 hasAuthorship W3124345991A5056156000 @default.
W3124345991 hasBestOaLocation W31243459911 @default.
W3124345991 hasConcept C115961682 @default.
W3124345991 hasConcept C119599485 @default.
W3124345991 hasConcept C121332964 @default.
W3124345991 hasConcept C127413603 @default.
W3124345991 hasConcept C131584629 @default.
W3124345991 hasConcept C154945302 @default.
W3124345991 hasConcept C159985019 @default.
W3124345991 hasConcept C165801399 @default.
W3124345991 hasConcept C172385210 @default.
W3124345991 hasConcept C184720557 @default.
W3124345991 hasConcept C192562407 @default.
W3124345991 hasConcept C41008148 @default.
W3124345991 hasConcept C62520636 @default.
W3124345991 hasConcept C62611344 @default.
W3124345991 hasConcept C99498987 @default.
W3124345991 hasConceptScore W3124345991C115961682 @default.
W3124345991 hasConceptScore W3124345991C119599485 @default.
W3124345991 hasConceptScore W3124345991C121332964 @default.
W3124345991 hasConceptScore W3124345991C127413603 @default.
W3124345991 hasConceptScore W3124345991C131584629 @default.
W3124345991 hasConceptScore W3124345991C154945302 @default.
W3124345991 hasConceptScore W3124345991C159985019 @default.
W3124345991 hasConceptScore W3124345991C165801399 @default.
W3124345991 hasConceptScore W3124345991C172385210 @default.
W3124345991 hasConceptScore W3124345991C184720557 @default.
W3124345991 hasConceptScore W3124345991C192562407 @default.
W3124345991 hasConceptScore W3124345991C41008148 @default.
W3124345991 hasConceptScore W3124345991C62520636 @default.
W3124345991 hasConceptScore W3124345991C62611344 @default.
W3124345991 hasConceptScore W3124345991C99498987 @default.
W3124345991 hasFunder F4320321681 @default.
W3124345991 hasFunder F4320322120 @default.
W3124345991 hasFunder F4320322202 @default.
W3124345991 hasLocation W31243459911 @default.
W3124345991 hasOpenAccess W3124345991 @default.
W3124345991 hasPrimaryLocation W31243459911 @default.
W3124345991 hasRelatedWork W1986891341 @default.
W3124345991 hasRelatedWork W2000187135 @default.
W3124345991 hasRelatedWork W2014411257 @default.
W3124345991 hasRelatedWork W2027596801 @default.
W3124345991 hasRelatedWork W2096317591 @default.
W3124345991 hasRelatedWork W2548182308 @default.
W3124345991 hasRelatedWork W2618238307 @default.
W3124345991 hasRelatedWork W2899084033 @default.
W3124345991 hasRelatedWork W2915097118 @default.