Matches in SemOpenAlex for { <https://semopenalex.org/work/W3126594089> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W3126594089 endingPage "126" @default.
- W3126594089 startingPage "121" @default.
- W3126594089 abstract "α-Ga2O3 has the largest bandgap (~5.3 eV) among the five polymorphs of Ga2O3 and is a promising candidate for high power electronic and optoelectronic devices. To fabricate various device structures, it is important to establish an effective dry etch process which can provide practical etch rate, smooth surface morphology and low ion-induced damage. Here, the etch characteristics of α-Ga2O3 epitaxy film were examined in two fluorine-based (CF4/Ar and SF6/Ar) inductively coupled plasmas. Under the same source power, rf chuck power and process pressure, an Ar-rich composition of CF4/Ar and an SF6-rich composition of SF6/Ar produced the highest etch rates. Monotonic increase in the etch rate was observed as the source power and rf chuck power increased in the 2CF4/13Ar discharges, and a maximum etch rate of ~855 Å/min was obtained at a 500 W source power, 250 W rf chuck power, and 2 mTorr pressure. A smooth surface morphology with normalized roughness of less than ~1.38 was achieved in the 2CF4/13Ar and 13SF6/2Ar discharges under most of the conditions examined. The features etched into the α-Ga2O3 layer using a 2CF4/13Ar discharge with 2 mTorr pressure showed good anisotropy with a vertical sidewall profile." @default.
- W3126594089 created "2021-02-15" @default.
- W3126594089 creator A5020514009 @default.
- W3126594089 creator A5028265103 @default.
- W3126594089 creator A5031342785 @default.
- W3126594089 creator A5036567193 @default.
- W3126594089 creator A5056950220 @default.
- W3126594089 creator A5084840516 @default.
- W3126594089 date "2021-02-05" @default.
- W3126594089 modified "2023-09-29" @default.
- W3126594089 title "Fluorine-based Inductively Coupled Plasma Etching of α-Ga2O3 Epitaxy Film" @default.
- W3126594089 doi "https://doi.org/10.3365/kjmm.2021.59.2.121" @default.
- W3126594089 hasPublicationYear "2021" @default.
- W3126594089 type Work @default.
- W3126594089 sameAs 3126594089 @default.
- W3126594089 citedByCount "1" @default.
- W3126594089 countsByYear W31265940892022 @default.
- W3126594089 crossrefType "journal-article" @default.
- W3126594089 hasAuthorship W3126594089A5020514009 @default.
- W3126594089 hasAuthorship W3126594089A5028265103 @default.
- W3126594089 hasAuthorship W3126594089A5031342785 @default.
- W3126594089 hasAuthorship W3126594089A5036567193 @default.
- W3126594089 hasAuthorship W3126594089A5056950220 @default.
- W3126594089 hasAuthorship W3126594089A5084840516 @default.
- W3126594089 hasBestOaLocation W31265940891 @default.
- W3126594089 hasConcept C100460472 @default.
- W3126594089 hasConcept C107365816 @default.
- W3126594089 hasConcept C110738630 @default.
- W3126594089 hasConcept C113196181 @default.
- W3126594089 hasConcept C121332964 @default.
- W3126594089 hasConcept C130472188 @default.
- W3126594089 hasConcept C159985019 @default.
- W3126594089 hasConcept C160671074 @default.
- W3126594089 hasConcept C171250308 @default.
- W3126594089 hasConcept C185592680 @default.
- W3126594089 hasConcept C191897082 @default.
- W3126594089 hasConcept C192562407 @default.
- W3126594089 hasConcept C194257627 @default.
- W3126594089 hasConcept C196054291 @default.
- W3126594089 hasConcept C2777859621 @default.
- W3126594089 hasConcept C2779227376 @default.
- W3126594089 hasConcept C30646810 @default.
- W3126594089 hasConcept C43617362 @default.
- W3126594089 hasConcept C46362747 @default.
- W3126594089 hasConcept C49040817 @default.
- W3126594089 hasConcept C62520636 @default.
- W3126594089 hasConcept C71039073 @default.
- W3126594089 hasConcept C81626474 @default.
- W3126594089 hasConcept C82706917 @default.
- W3126594089 hasConcept C95974651 @default.
- W3126594089 hasConcept C97355855 @default.
- W3126594089 hasConceptScore W3126594089C100460472 @default.
- W3126594089 hasConceptScore W3126594089C107365816 @default.
- W3126594089 hasConceptScore W3126594089C110738630 @default.
- W3126594089 hasConceptScore W3126594089C113196181 @default.
- W3126594089 hasConceptScore W3126594089C121332964 @default.
- W3126594089 hasConceptScore W3126594089C130472188 @default.
- W3126594089 hasConceptScore W3126594089C159985019 @default.
- W3126594089 hasConceptScore W3126594089C160671074 @default.
- W3126594089 hasConceptScore W3126594089C171250308 @default.
- W3126594089 hasConceptScore W3126594089C185592680 @default.
- W3126594089 hasConceptScore W3126594089C191897082 @default.
- W3126594089 hasConceptScore W3126594089C192562407 @default.
- W3126594089 hasConceptScore W3126594089C194257627 @default.
- W3126594089 hasConceptScore W3126594089C196054291 @default.
- W3126594089 hasConceptScore W3126594089C2777859621 @default.
- W3126594089 hasConceptScore W3126594089C2779227376 @default.
- W3126594089 hasConceptScore W3126594089C30646810 @default.
- W3126594089 hasConceptScore W3126594089C43617362 @default.
- W3126594089 hasConceptScore W3126594089C46362747 @default.
- W3126594089 hasConceptScore W3126594089C49040817 @default.
- W3126594089 hasConceptScore W3126594089C62520636 @default.
- W3126594089 hasConceptScore W3126594089C71039073 @default.
- W3126594089 hasConceptScore W3126594089C81626474 @default.
- W3126594089 hasConceptScore W3126594089C82706917 @default.
- W3126594089 hasConceptScore W3126594089C95974651 @default.
- W3126594089 hasConceptScore W3126594089C97355855 @default.
- W3126594089 hasIssue "2" @default.
- W3126594089 hasLocation W31265940891 @default.
- W3126594089 hasOpenAccess W3126594089 @default.
- W3126594089 hasPrimaryLocation W31265940891 @default.
- W3126594089 hasRelatedWork W1551067740 @default.
- W3126594089 hasRelatedWork W1953159322 @default.
- W3126594089 hasRelatedWork W1963666834 @default.
- W3126594089 hasRelatedWork W1983937329 @default.
- W3126594089 hasRelatedWork W1992219747 @default.
- W3126594089 hasRelatedWork W2007813469 @default.
- W3126594089 hasRelatedWork W2118045353 @default.
- W3126594089 hasRelatedWork W2134397858 @default.
- W3126594089 hasRelatedWork W2387343942 @default.
- W3126594089 hasRelatedWork W2646369260 @default.
- W3126594089 hasVolume "59" @default.
- W3126594089 isParatext "false" @default.
- W3126594089 isRetracted "false" @default.
- W3126594089 magId "3126594089" @default.
- W3126594089 workType "article" @default.