FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3126976072> ?p ?o ?g. }

• W3126976072 abstract "An automatically and fast-controlled frequency tunable radiofrequency (rf) system is employed to a plasma etching device, where the rf system contains two rf amplifiers operational in 37 MHz–43 MHz for a plasma source and a wafer stage. Both impedance matching circuits for the source and the wafer stage have no variable capacitors, leading a compact design of the rf system; the power reflection can be minimized by adjusting the frequencies. The rf frequency and the output power are automatically controlled so as to minimize a reflection coefficient and to maintain a constant net power corresponding to a forward power minus a reflected power for both the source and the stage. The source is operated with SF6 and C4F8 gases for silicon etching and passivation in the Bosch process, respectively. For both the cases, the impedance tuning can be accomplished within several ms and the net power is maintained at a constant level. By alternatively switching the SF6 and C4F8 plasmas with pulse widths of 5 s and 2 s, respectively, a vertical silicon etching is performed, where a scallop structure is clearly formed on the etching side wall. By shortening the pulse widths down to 1 s and 0.4 s for the SF6 and C4F8 plasmas, the size of the scallop structure is significantly reduced; the usability of the automatically and fast-controlled rf plasma source for the Bosch process is demonstrated." @default.
• W3126976072 created "2021-02-15" @default.
• W3126976072 creator A5057754732 @default.
• W3126976072 creator A5084658667 @default.
• W3126976072 date "2021-02-01" @default.
• W3126976072 modified "2023-10-17" @default.
• W3126976072 title "Vertical silicon etching by using an automatically and fast-controlled frequency tunable rf plasma source" @default.
• W3126976072 cites W1967522618 @default.
• W3126976072 cites W1969852806 @default.
• W3126976072 cites W1982130714 @default.
• W3126976072 cites W1984719433 @default.
• W3126976072 cites W1988150418 @default.
• W3126976072 cites W1992129580 @default.
• W3126976072 cites W2008225124 @default.
• W3126976072 cites W2009697452 @default.
• W3126976072 cites W2017214888 @default.
• W3126976072 cites W2018237554 @default.
• W3126976072 cites W2029550069 @default.
• W3126976072 cites W2030524422 @default.
• W3126976072 cites W2033346211 @default.
• W3126976072 cites W2042939027 @default.
• W3126976072 cites W2057105806 @default.
• W3126976072 cites W2057133833 @default.
• W3126976072 cites W2057459980 @default.
• W3126976072 cites W2069886196 @default.
• W3126976072 cites W2104338809 @default.
• W3126976072 cites W2113775257 @default.
• W3126976072 cites W2145800874 @default.
• W3126976072 cites W2158819326 @default.
• W3126976072 cites W2280377479 @default.
• W3126976072 cites W2558502624 @default.
• W3126976072 cites W2624899656 @default.
• W3126976072 cites W2746961986 @default.
• W3126976072 cites W2890296948 @default.
• W3126976072 cites W2902679401 @default.
• W3126976072 cites W2947176385 @default.
• W3126976072 cites W3002287968 @default.
• W3126976072 cites W3002902580 @default.
• W3126976072 cites W3015629313 @default.
• W3126976072 cites W3019466955 @default.
• W3126976072 cites W3046936635 @default.
• W3126976072 cites W3094073807 @default.
• W3126976072 doi "https://doi.org/10.1063/5.0038596" @default.
• W3126976072 hasPublicationYear "2021" @default.
• W3126976072 type Work @default.
• W3126976072 sameAs 3126976072 @default.
• W3126976072 citedByCount "4" @default.
• W3126976072 countsByYear W31269760722022 @default.
• W3126976072 countsByYear W31269760722023 @default.
• W3126976072 crossrefType "journal-article" @default.
• W3126976072 hasAuthorship W3126976072A5057754732 @default.
• W3126976072 hasAuthorship W3126976072A5084658667 @default.
• W3126976072 hasConcept C100460472 @default.
• W3126976072 hasConcept C107187091 @default.
• W3126976072 hasConcept C119599485 @default.
• W3126976072 hasConcept C120665830 @default.
• W3126976072 hasConcept C121332964 @default.
• W3126976072 hasConcept C127413603 @default.
• W3126976072 hasConcept C130472188 @default.
• W3126976072 hasConcept C160671074 @default.
• W3126976072 hasConcept C165801399 @default.
• W3126976072 hasConcept C171250308 @default.
• W3126976072 hasConcept C17829176 @default.
• W3126976072 hasConcept C192562407 @default.
• W3126976072 hasConcept C194257627 @default.
• W3126976072 hasConcept C196054291 @default.
• W3126976072 hasConcept C199360897 @default.
• W3126976072 hasConcept C2779227376 @default.
• W3126976072 hasConcept C41008148 @default.
• W3126976072 hasConcept C46362747 @default.
• W3126976072 hasConcept C49040817 @default.
• W3126976072 hasConcept C52192207 @default.
• W3126976072 hasConcept C544956773 @default.
• W3126976072 hasConcept C612350 @default.
• W3126976072 hasConcept C62520636 @default.
• W3126976072 hasConcept C65682993 @default.
• W3126976072 hasConcept C74064498 @default.
• W3126976072 hasConcept C82706917 @default.
• W3126976072 hasConceptScore W3126976072C100460472 @default.
• W3126976072 hasConceptScore W3126976072C107187091 @default.
• W3126976072 hasConceptScore W3126976072C119599485 @default.
• W3126976072 hasConceptScore W3126976072C120665830 @default.
• W3126976072 hasConceptScore W3126976072C121332964 @default.
• W3126976072 hasConceptScore W3126976072C127413603 @default.
• W3126976072 hasConceptScore W3126976072C130472188 @default.
• W3126976072 hasConceptScore W3126976072C160671074 @default.
• W3126976072 hasConceptScore W3126976072C165801399 @default.
• W3126976072 hasConceptScore W3126976072C171250308 @default.
• W3126976072 hasConceptScore W3126976072C17829176 @default.
• W3126976072 hasConceptScore W3126976072C192562407 @default.
• W3126976072 hasConceptScore W3126976072C194257627 @default.
• W3126976072 hasConceptScore W3126976072C196054291 @default.
• W3126976072 hasConceptScore W3126976072C199360897 @default.
• W3126976072 hasConceptScore W3126976072C2779227376 @default.
• W3126976072 hasConceptScore W3126976072C41008148 @default.
• W3126976072 hasConceptScore W3126976072C46362747 @default.
• W3126976072 hasConceptScore W3126976072C49040817 @default.
• W3126976072 hasConceptScore W3126976072C52192207 @default.
• W3126976072 hasConceptScore W3126976072C544956773 @default.
• W3126976072 hasConceptScore W3126976072C612350 @default.

• next