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- W312729557 abstract "Abstract : This project is to request equipment funding for a novel parallel, high speed, large scale nano-manufacturing instrument. The key element of the instrument is a nanoscale optical antenna capable of producing a nanometer size light spot, which has been demonstrated in the PI's laboratory. With the use of an array of nanoscale optical antenna to produce a large number of nanometer size laser beams, a large number of patterns can be fabricated simultaneously, or a complex pattern with nanometer size features can be fabricated over a large area. We have acquired the necessary equipment and have built the instrument. Current research is focused on testing the instrument for parallel nano-manufacturing." @default.
- W312729557 created "2016-06-24" @default.
- W312729557 creator A5063331773 @default.
- W312729557 date "2006-04-29" @default.
- W312729557 modified "2023-09-26" @default.
- W312729557 title "Equipment for Parallel High Speed Nano-Manufacturing" @default.
- W312729557 doi "https://doi.org/10.21236/ada470798" @default.
- W312729557 hasPublicationYear "2006" @default.
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