Matches in SemOpenAlex for { <https://semopenalex.org/work/W3127299284> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W3127299284 abstract "Abstract The synthesis of vertically aligned carbon nanotubes (CNTs), also referred to as CNT forest, by chemical vapor deposition (CVD) is an intricate process that is sensitive to multiple factors other than control of temperature, pressure, and gas flows. In particular, growth is highly sensitive to factors like ambient humidity, as well as small quantities of oxygen-containing species and carbon deposits inside the reactor. These typically uncontrolled factors significantly affect growth reproducibility and hinders the fundamental study of process-structure-property relationship for these emerging materials. Accordingly, universally applicable design modifications and process steps toward improve growth consistency are sought after. In this study, we introduce two new modifications to our custom-designed multizone rapid thermal CVD reactor and demonstrate their impact on growth: (1) reconfiguring the inlet gas plumbing to add a gas purifier to the helium (He) line, and (2) designing a new support wafer for consistent loading of substrates. We use statistical analysis to test the effectiveness of these modifications in improving growth and reducing variability of both CNT forest height and density. Analysis of our experimental results and hypothesis testing show that combining the implementation of He purifier with the redesigned support wafer increases forest height and reduces the variability in height (17-folds), both at statistically significant and practically significant levels." @default.
- W3127299284 created "2021-02-15" @default.
- W3127299284 creator A5014119386 @default.
- W3127299284 creator A5025898954 @default.
- W3127299284 creator A5067322873 @default.
- W3127299284 creator A5090099691 @default.
- W3127299284 date "2020-09-03" @default.
- W3127299284 modified "2023-10-18" @default.
- W3127299284 title "Reducing Variability in Chemical Vapor Deposition of Carbon Nanotubes Based on Gas Purification and Sample Support Redesign" @default.
- W3127299284 cites W1607019360 @default.
- W3127299284 cites W1984454650 @default.
- W3127299284 cites W2012504012 @default.
- W3127299284 cites W2017777143 @default.
- W3127299284 cites W2048839795 @default.
- W3127299284 cites W2060128143 @default.
- W3127299284 cites W2073254867 @default.
- W3127299284 cites W2076275463 @default.
- W3127299284 cites W2093692034 @default.
- W3127299284 cites W2095432691 @default.
- W3127299284 cites W2097845215 @default.
- W3127299284 cites W2108477241 @default.
- W3127299284 cites W2274826628 @default.
- W3127299284 cites W2324482043 @default.
- W3127299284 cites W2335315942 @default.
- W3127299284 cites W2346543723 @default.
- W3127299284 cites W2397853634 @default.
- W3127299284 cites W2556532952 @default.
- W3127299284 cites W2606794186 @default.
- W3127299284 cites W2769182252 @default.
- W3127299284 cites W2788921745 @default.
- W3127299284 cites W2949014767 @default.
- W3127299284 cites W2954785114 @default.
- W3127299284 cites W2955158046 @default.
- W3127299284 cites W2963472229 @default.
- W3127299284 cites W2987524458 @default.
- W3127299284 cites W3001088588 @default.
- W3127299284 doi "https://doi.org/10.1115/msec2020-8388" @default.
- W3127299284 hasPublicationYear "2020" @default.
- W3127299284 type Work @default.
- W3127299284 sameAs 3127299284 @default.
- W3127299284 citedByCount "0" @default.
- W3127299284 crossrefType "proceedings-article" @default.
- W3127299284 hasAuthorship W3127299284A5014119386 @default.
- W3127299284 hasAuthorship W3127299284A5025898954 @default.
- W3127299284 hasAuthorship W3127299284A5067322873 @default.
- W3127299284 hasAuthorship W3127299284A5090099691 @default.
- W3127299284 hasConcept C104779481 @default.
- W3127299284 hasConcept C121332964 @default.
- W3127299284 hasConcept C127413603 @default.
- W3127299284 hasConcept C140205800 @default.
- W3127299284 hasConcept C151420433 @default.
- W3127299284 hasConcept C151730666 @default.
- W3127299284 hasConcept C153294291 @default.
- W3127299284 hasConcept C159985019 @default.
- W3127299284 hasConcept C160671074 @default.
- W3127299284 hasConcept C171250308 @default.
- W3127299284 hasConcept C192562407 @default.
- W3127299284 hasConcept C21880701 @default.
- W3127299284 hasConcept C2816523 @default.
- W3127299284 hasConcept C39432304 @default.
- W3127299284 hasConcept C513720949 @default.
- W3127299284 hasConcept C57410435 @default.
- W3127299284 hasConcept C64297162 @default.
- W3127299284 hasConcept C86803240 @default.
- W3127299284 hasConceptScore W3127299284C104779481 @default.
- W3127299284 hasConceptScore W3127299284C121332964 @default.
- W3127299284 hasConceptScore W3127299284C127413603 @default.
- W3127299284 hasConceptScore W3127299284C140205800 @default.
- W3127299284 hasConceptScore W3127299284C151420433 @default.
- W3127299284 hasConceptScore W3127299284C151730666 @default.
- W3127299284 hasConceptScore W3127299284C153294291 @default.
- W3127299284 hasConceptScore W3127299284C159985019 @default.
- W3127299284 hasConceptScore W3127299284C160671074 @default.
- W3127299284 hasConceptScore W3127299284C171250308 @default.
- W3127299284 hasConceptScore W3127299284C192562407 @default.
- W3127299284 hasConceptScore W3127299284C21880701 @default.
- W3127299284 hasConceptScore W3127299284C2816523 @default.
- W3127299284 hasConceptScore W3127299284C39432304 @default.
- W3127299284 hasConceptScore W3127299284C513720949 @default.
- W3127299284 hasConceptScore W3127299284C57410435 @default.
- W3127299284 hasConceptScore W3127299284C64297162 @default.
- W3127299284 hasConceptScore W3127299284C86803240 @default.
- W3127299284 hasLocation W31272992841 @default.
- W3127299284 hasOpenAccess W3127299284 @default.
- W3127299284 hasPrimaryLocation W31272992841 @default.
- W3127299284 hasRelatedWork W16323368 @default.
- W3127299284 hasRelatedWork W16829515 @default.
- W3127299284 hasRelatedWork W22628064 @default.
- W3127299284 hasRelatedWork W24495391 @default.
- W3127299284 hasRelatedWork W28002540 @default.
- W3127299284 hasRelatedWork W28256737 @default.
- W3127299284 hasRelatedWork W31367629 @default.
- W3127299284 hasRelatedWork W37410184 @default.
- W3127299284 hasRelatedWork W43711054 @default.
- W3127299284 hasRelatedWork W21834779 @default.
- W3127299284 isParatext "false" @default.
- W3127299284 isRetracted "false" @default.
- W3127299284 magId "3127299284" @default.
- W3127299284 workType "article" @default.